Spherical scattering-light device for simultaneous phase and intensity measurements
OwnerRaymond J. Castonguayinventor
Life of this patent
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Abstract
A far-field measurement instrument has multiple imaging lenses cut into a pentagon shape and arranged in geodesic spherical configuration with a common field of view focused on the source of the scattered light to be measured. Aspheric lenses are used to facilitate collimation of large incident angles of scattered light. A measurement module, such as a camera, is used behind each lens. The measurement module may consist of an interferometer or Shack-Hartman wavefront sensor, thereby enabling the measurement of both intensity and phase of the scattered light.
Claims34
A device for measuring light propagated from a point source on a sample surface, comprising:
- a stage for holding the sample surface;
- a plurality of multi-pixel sensors adapted to measure intensity values of light fractions propagated radially from said point source on the sample surface;
- and
- an optical system including a plurality of lenses arranged in a hemispherical configuration for collimating a predetermined portion of said light fractions toward one of the plurality of multi-pixel sensors so that each of said portions of light fractions is received by a corresponding set of pixels in said one of the plurality of multi-pixel sensors.
A device for measuring light scattered radially from a point source on a sample surface, comprising:
- a substantially hemispherical structure defining an equatorial plane;
- a stage for holding the sample surface at a position substantially on said equatorial plane;
- a test light source adapted to illuminate the sample surface at a predetermined angle of incidence;
- a plurality of multi-pixel sensors adapted to measure intensity values of light fractions scattered radially toward discrete portions of an interior surface of the substantially hemispherical structure;
- and
- an optical system for collimating said light fractions toward said plurality of multi-pixel sensors, said optical system including a plurality of lenses arranged in a hemispherical configuration over said substantially hemispherical structure.
Dependencies are inferred from the claim text.