Method and apparatus for measuring bandwidth of an optical spectrum output of a very small wavelength very narrow bandwidth high power laser
AssigneeCymer, Inc.
InventorRobert Rafac
Life of this patent
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AssigneeCymer, Inc.
InventorRobert Rafac
Estimating the term…
An apparatus and method for controlling a laser system is disclosed which may comprise a spectrometer adapted to measure an unknown bandwidth of a spectrum of light emitted from the laser, which may comprise an optical bandwidth measuring unit adapted to provide as an output a measured parameter, which is indicative of a parameter of the unknown bandwidth of the spectrum being measured; a reported parameter computing unit adapted to compute a reported parameter of the unknown bandwidth of the spectrum being measured according to the formula: Reported Parameter(“RP”)=A*(Measured Parameter(“MP”))+C, wherein the RP and MP are a different type of parameter and the values of A and C are determined based upon calibration of the optical bandwidth measuring unit MP response for light of known valued of RP.
A laser monitoring system, comprising:
A spectrometer for measuring an unknown bandwidth of a spectrum of light, comprising:
A laser control system, comprising:
A spectrometer for measuring an-unknown bandwidth of a spectrum of light, comprising:
A method for controlling a laser, comprising:
A method for measuring an unknown bandwidth of a spectrum of light, comprising:
Dependencies are inferred from the claim text.