Particle detecting system and method of detecting particles using the same
AssigneeSamsung Electronics Co., Ltd.
InventorSang-Hun Kim
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Abstract
There is provided a particle detector system and to detect particles on target including reticle and pellicle. The system includes a light transmitting device adapted to transmit light beam to a target through an electrowetting microlens, a light receiving device adapted to receive the transmitted light beam reflected by a surface of the target, a light refraction angle adjusting controller adapted to apply a voltage to the electrowetting microlens in order to adjust an incident angle of the light irradiated, and a detector adapted to analyze the light received by the light receiving device to determine whether there are particles on a surface of the target.
Claims13
A particle detector system, comprising:
- a light transmitting device adapted to transmit a light beam to a target through an electrowetting microlens;
- a light receiving device adapted to receive the transmitted light beam reflected by a surface of the target;
- a light refraction angle adjusting device adapted to apply a voltage to the electrowetting microlens in order to adjust an incident angle of the transmitted light beam;
- and
- a detector adapted to analyze the light received by the light receiving device to determine whether there are particles on a surface of the surface of the target.
A method of detecting particles on a target, comprising:
- transmitting light beam to a target through an electrowetting microlens;
- receiving light beam reflected by a surface of the target;
- adjusting an incident angle of the transmitted light beam based on a type or presence of a pellicle of the target;
- and
- analyzing the received light to determine whether there are particles on the surface of the target and generating an output signal indicative of the determination.
Dependencies are inferred from the claim text.