Semiconductor array tester

A method for screening individual ones of a semiconductor device of an electro-optical array, the method comprising the steps of:

• providing a fixed reference for measurement purposes;
• securing the electro-optical array in a fixed position referenced from the fixed reference, wherein the securing step comprises the steps of:
• stepping a probe towards the electro-optical array in a first step size;
• checking to determine if an electrical loop is closed on the electro-optical array;
• continuing to step the probe continuously in a second step size that is continuously smaller than the previous step size, as expected contact is approximated, toward the laser array until the electrical loop is closed;
• and
• contacting the electro-optical array in the fixed position with the probe and securing the probe in a contact position for closing the electrical loop, wherein the contact position is not moved from the fixed reference and contact is maintained as the fixed reference and as the fixed position for all subsequent polarization-resolving of optical measurements of the same individual one of the semiconductor devices of the electro-optical array;
• and
• moving at least one detector to a selected position referenced from the fixed reference, wherein the selected position of the at least one detector is also changed from the fixed position of the laser array.

A tester for screening individual ones of a semiconductor device of an electro-optical array, the tester comprising:

• a vacuum suction for securing the array while the array is moved horizontally to a preselected indexed position referenced from a fixed reference;
• a vacuum held and temperature controlled semiconductor electro-optical device array array assembly for receiving the vacuum suction and holding the array in the fixed position once the selected semiconductor device has been moved horizontally to the preselected indexed position referenced from the fixed reference;
• a vertically movable prober for contacting the selected semiconductor device at the preselected indexed position at a contact position, wherein the contact position is not moved from the fixed reference and contact is maintained as the fixed reference and as the fixed position for all subsequent optical measurements of the same individual one of the semiconductor device of the electro-optical array;
• wherein the vertically movable prober comprises:
• a fixture controllable for providing a vertical movement;
• a first probe mounted on the fixture for contacting the selected semiconductor device at the preselected indexed position;
• a second probe mounted on the fixture for contacting the vacuum held and temperature controlled laser array assembly for minimizing microwave reflections;
• and
• at least one movable detector movable from the fixed reference for polarization resolving an optical measurement of the selected semiconductor device as a function of the distance moved by the at least one detector with reference to the preselected indexed position of the selected semiconductor device, wherein the change in angular displacement of the at least one detector from the preselected indexed position of the selected semiconductor device is the same change in distance of the at least one detector from the fixed reference.