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US 7,256,600 B2Granted
Method and system for testing semiconductor devices
AssigneeTeradyne, Inc.
InventorsErnest Walker, Ronald A. Sartschev
Life of this patent
Estimating the term…
Abstract
A semiconductor device tester includes a parametric measurement unit (PMU) stage for producing a DC test signal and a pin electronics (PE) stage for producing an AC test signal to test a semiconductor device. A driver circuit is capable of providing a version of the DC test signal and a version of the AC test signal to the semiconductor device.
Claims19
A semiconductor device tester, comprising:
- a PMU stage configured to provide a DC test signal, the DC test signal comprising one of plural test signals, at least two of the plural test signals having different current levels;
- a PE stage configured to produce an AC test signal;
- a driver circuit configured to provide, in a first mode, a version of the DC test signal in a case that the DC test signal is for producing a test signal having a higher current level than others of the plural test signals and, in a second mode, to provide a version of the AC test signal;
- and
- an output stage through which test signals pass on a path to a semiconductor device;
- wherein, in a case that the DC test signal is for producing a test signal having less than the higher current level, the DC test signal passes to the output stage through circuitry that bypasses the driver.
3 more elements
A semiconductor device tester, comprising:
- a PMU stage configured to provide a DC test signal, the DC test signal comprising one of plural test signals, each of the plural test signals having a different current level than others of the plural test signals;
- a PE stage configured to produce an AC test signal;
- a circuit configured to pass, in response to a control signal, either (i) a version of the DC test signal in a case that the DC test signal is for producing a test signal having a higher current level than others of the plural test signals, or (ii) a version of the AC test signal;
- and
- an output stage through which test signals pass;
- wherein, in a case that the DC test signal is for producing a test signal having less than the higher current level, the DC test signal passes to the output stage through circuitry that bypasses the circuit.
3 more elements
A method of providing test signals to a semiconductor device, comprising:
- producing a DC test signal using a PMU stage;
- in a case that the DC test signal is for producing a DC test signal having a current level that is greater than a predefined current level, amplifying the DC test signal using a driver circuit that is also configured to amplify an AC test signal from a PE stage;
- causing the DC test signal to bypass the driver circuit if the DC test signal is to have a current level that is less than the predefined current level;
- and
- sending the DC test signal or the amplified DC test signal through an output stage to the semiconductor device under test, wherein the output stage is also configured to provide an amplified AC test signal from the PE stage to the semiconductor device.
2 more elements
Dependencies are inferred from the claim text.