Back to results
US 7,256,592 B2Granted
Probe with trapezoidal contractor and device based on application thereof, and method of producing them
AssigneeTokyo Electron Limited
InventorsHisatomi Hosaka, Kiyoshi Takekoshi
Life of this patent
Estimating the term…
Abstract
A probe is disclosed, comprising a beam, which has a front end, an intermediate portion and a base end. The leading end is a portion for contacting a test subject through a contactor, the base end being a portion for fixing the probe. The probe includes a substantially trapezoidal contactor, which is fixed to the leading end of the beam.
Claims3
A probe card comprising:
- a plurality of probes, each probe for contacting with an electrode of a test subject formed on a substrate to inspect electrical characteristics of the test subject, each probe including a beam having a leading end portion, an intermediate portion and a base end portion;
- the base end portion being a portion for fixing the probe on the probe card;
- and a contactor having a substantially trapezoidal shape and disposed at the leading end portion of the beam, an inner part of the contactor being essentially filled with one or more metals, wherein the leading end portion is a portion for making a contact with the test subject via the contactor;
- and
- a probe card main body including first terminals installed on a first surface thereof and serving as supporting columns for the probes and second terminals installed on a second surface thereof,
- wherein each of the second terminals is electrically connected to a different one of the first terminals;
- and the base end portion of each probe is fixed to said different one of the first terminals,
- wherein the probe card main body further includes a stopper, and
- wherein the stopper has a body portion substantially identical to the first terminal in composition and an electrically insulating film formed at least at a stopper surface contacting a surface of the test subject.
6 more elements
A probe array supporting unit for supporting a probe array with a predetermined tension, wherein the probe array is used in a manufacturing process of a probe card and includes:
- a second film-shaped supporting body having elasticity;
- and
- a plurality of probes adhered onto one surface of the second film-shaped supporting body, each probe including a beam and a contactor having a substantially trapezoidal shape, an inner part of the contactor being essentially filled with one or more metals,
- wherein the beam has a leading end portion, an intermediate portion and a base end portion, the leading end portion being a portion for making a contact with a test subject via the contactor, the base end portion being a portion for fixing each probe on the probe card;
- and the contactor is disposed at the leading end portion of the beam, a top portion of the contactor being embedded in the second film-shaped supporting body,
- the probe array supporting unit comprising:
- a first fixing part, which is a first frame shaped structure;
- a second fixing part, wherein the second fixing part is a second frame shaped structure and overlapped with the first fixing part via the probe array,
- wherein while the second fixing part is overlapped with the first fixing part, the probe array is supported by both fixing parts under a predetermined tension;
- and
- a locking part for locking and fixing the overlapped first and second fixing parts.
8 more elements
Dependencies are inferred from the claim text.