Probe card, having cantilever-type probe and method
AssigneeFujitsu Limited
InventorsTsutomu Tatematsu, Kenji Togashi, Tetsuhiro Nanbu, Shigenobu Ishihara, Morihiko Hamada, Yoshikazu Arisaka, Kunihiro Itagaki, Shigekazu Aoki
Life of this patent
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Abstract
A probe card is used to test an electronic device. The probe card includes a base plate and a cantilever-type probe arranged on the base plate. The cantilever-type probe has an end that contacts the contacted body and moves when contacting the contacted body. A stopper arranged on the base plate restricts the movement of the cantilever-type probe.
Claims17
A probe card used to test an electronic device having contacted bodies, the probe card comprising:
- a base plate;
- a plurality of cantilever-type probes each having only a basal end of the probe attached to the base plate, wherein each of the cantilever-type probes has an inclined distal end that contacts respective one of the contacted bodies and an inclined intermediate portion extending between the basal end and the distal end and being inclined with respect to the base plate and not attached to the base plate, each of the inclined distal ends is inclined with respect to both of the basal end and the intermediate portion and slides in a direction along a surface of the respective contacted body when contacting the respective contacted body;
- and
- a slide stopper arranged on the base plate restricting the slide of the inclined distal ends of the cantilever-type probes when contacting sides of the inclined distal ends.
A method for having a plurality of cantilever-type probes contact contacted bodies, wherein each of the cantilever-type probes extends from a peripheral portion of a base plate toward a middle portion of the base plate and includes a basal end attached to the base plate, and an inclined distal end that contacts a respective one of the contacted bodies, and an inclined intermediate portion being inclined with respect to the base plate and not attached to the base plate, the inclined distal end being inclined with respect to both of the basal end and the intermediate portion, the method comprising:
- sliding each of the inclined distal ends of the cantilever-type probes toward the middle portion of the base plate in a direction along a surface of the respective contacted body while the inclined distal end contacts the respective contacted body;
- and
- restricting the slide of the cantilever-type probes by contacting sides of the inclined distal ends of the probes to a slide stopper.
A probe card used to test an electronic device having contacted bodies, the probe card comprising:
- a base plate;
- a plurality of cantilever-type probes each having only a basal end attached to the base plate, wherein each of the cantilever-type probes has an inclined distal end that contacts respective one of the contacted bodies and an inclined intermediate portion extending between the basal end and the distal end and being inclined with respect to the base plate and not attached to the base plate, the inclined distal end being inclined with respect to both of the basal end and the intermediate portion and sliding in a direction along a surface of the respective contacted body when contacting the respective contacted body;
- and
- a slide stopper arranged on the base plate restricting the slide of the inclined distal ends of the cantilever-type probes when contacting sides of the inclined distal ends of the cantilever-type probes, wherein the slide stopper has a side surface separated from the inclined distal ends of the cantilever-type probes by a predetermined distance.
A probe card used to test an electronic device, the probe card comprising:
- a base plate;
- a plurality of probes each having a basal end fixed to a peripheral portion of the base plate, an inclined distal end, and an intermediate portion extending between the basal end and the inclined distal end, the intermediate portion being inclined with respect to the base plate, wherein each of the inclined distal ends is inclined with respect to both of the basal end and the intermediate portion and contacts a contact of the electronic device when testing the electronic device;
- and
- a slide stopper arranged on the base plate restricting the slide of the inclined distal ends of the probes when contacting sides of the inclined distal ends.
Dependencies are inferred from the claim text.