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US 7,256,535 B2Granted
Diamond triode devices with a diamond microtip emitter
AssigneeVanderbilt University
InventorsJimmy L. Davidson, Wang Poo Kang, David V. Kerns, Mickey Evans Howell
Life of this patent
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Abstract
Diamond microtip field emitters are used in triode vacuum microelectronic devices, sensors and displays. Diamond triode devices having integral anode and grid structures can be fabricated. Ultra-sharp tips are formed on the emitters in a fabrication process in which diamond is deposited into mold cavities in a two-step deposition sequence. During deposition of the diamond, the carbon graphite content is carefully controlled to enhance emission performance. The tips or the emitters are treated by post-fabrication processes to further enhance performance.
Claims21
A diamond triode device comprising:
- a. a cathode comprising a diamond microtip emitter extending upwardly from and formed integral to a diamond substrate having a top surface, the diamond microtip emitter comprising polycrystalline diamond;
- b. a grid mounted on a grid insulator, the grid insulator mounted on and extending upwardly from the top surface of the diamond substrate;
- and
- c. an anode mounted on an insulator, the insulator mounted on and extending upwardly from the top surface of the diamond substrate.
1 more element
A diamond triode device comprising:
- a. a cathode comprising a diamond microtip emitter extending upwardly from and formed integral to a diamond substrate having a top surface, the diamond microtip emitter comprising polycrystalline diamond;
- b. a grid layer formed around and spaced apart from the emitter and suspended above the diamond substrate by a first insulating layer extending upwardly from the top surface of the diamond substrate;
- and
- c. an anode layer positioned above and spaced apart from the diamond microtip, supported by a second insulating layer extending upwardly from a top surface of the grid layer.
1 more element
A diamond triode device comprising:
- a. a cathode comprising a diamond microtip emitter extending upwardly from and formed integral to a diamond substrate having a top surface, the diamond microtip emitter comprising polycrystalline diamond;
- b. an anode layer spaced laterally apart from the emitter and suspended above the diamond substrate by a first insulating layer extending upwardly from the top surface of the diamond substrate;
- and
- c. a grid layer spaced laterally apart from the diamond microtip, supported by a second insulating layer extending upwardly from the top surface of the diamond substrate layer.
1 more element
A diamond triode device comprising:
- a. a cathode comprising a diamond microtip emitter extending upwardly from and formed integral to a diamond substrate having a top surface, the diamond microtip emitter comprising polycrystalline diamond;
- b. a grid layer formed around and spaced apart from the emitter and suspended above the diamond substrate by a first insulating layer extending upwardly from the top surface of the diamond substrate;
- and
- c. an anode layer positioned above and spaced apart from the diamond microtip, supported by a second insulating layer extending upwardly from a top surface of the arid layer,
- wherein the diamond microtip emitter comprises a patterned array of polycrystalline diamond emitters extending upwardly from and formed integral to the diamond substrate.
2 more elements
A diamond triode device comprising:
- a. a cathode comprising a diamond microtip emitter extending upwardly from and formed integral to a diamond substrate having a top surface;
- b. a grid layer formed around and spaced apart from the emitter and suspended above the diamond substrate by a first insulating layer extending upwardly from the top surface of the diamond substrate;
- and
- c. an anode layer positioned above and spaced apart from the diamond microtip, supported by a second insulating layer extending upwardly from a top surface of the grid layer,
- wherein the diamond microtip emitter comprises at least one polycrystalline diamond casting terminated with a sharply pointed emitter tip.
2 more elements
A diamond triode device comprising:
- a. a cathode comprising a diamond microtip emitter extending upwardly from and formed integral to a diamond substrate having a top surface;
- b. a grid layer formed around and spaced apart from the emitter and suspended above the diamond substrate by a first insulating layer extending upwardly from the top surface of the diamond substrate;
- and
- c. an anode layer positioned above and spaced apart from the diamond microtip, supported by a second insulating layer extending upwardly from a top surface of the grid layer,
- wherein the diamond microtip emitter comprises at least one polycrystalline diamond casting, and
- wherein the polycrystalline diamond casting comprises a diamond emitter having a tip curvature of not more than 200 Angstroms.
3 more elements
A diamond triode device comprising:
- a. a cathode comprising a diamond microtip emitter extending upwardly from and formed integral to a diamond substrate having a top surface;
- b. a grid layer formed around and spaced apart from the emitter and suspended above the diamond substrate by a first insulating layer extending upwardly from the top surface of the diamond substrate;
- and
- c. an anode layer positioned above and spaced apart from the diamond microtip, supported by a second insulating layer extending upwardly from a top surface of the grid layer,
- wherein the diamond microtip emitter comprises at least one polycrystalline diamond casting, and
- wherein the polycrystalline diamond casting comprises a diamond emitter having a tip and having a grain size of not more than 2000 Angstroms near the tip.
3 more elements
Dependencies are inferred from the claim text.