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AssigneeSilecs Oy
InventorsJason S. Reid, Nungavram S. Viswanathan
Estimating the term…
A micro-electromechanical device is formed on a substrate. The device has sliding, abrading or impacting surfaces. At least one of these surfaces is covered with an anti-stiction material. The anti-stiction material is provided from a slicon compound precursor (e.g. silane, silanol) or multiple silicon compound precursors. Preferably the precursor(s) is fluorinated—more preferably perfluorinated, and is deposited with a solvent as a low molecular weight oligomer or in monomeric form. Examples include silanes (fluorinated or not) with aromatic or polycyclic ring sturctures, and/or silanes (fluorinated or not) having alkenyl, alkynyl, epoxy or acrylate groups. Mixtures either or both of these groups with alkyl chain silanes (preferably fluorinated) are also contemplated.
A MEMS device, comprising:
A MEMS device comprising a stationary structure and a movable structure, the movable structure impacting the stationary structure when actuated and wherein the movable structure and/or the stationary structure are coated with a layer comprising a siloxane material having a partially or fully fluorinated aromatic ring structure and wherein said layer is formed by hydrolyzing a silane selected from the group consisting of a tetraalkoxysilane, a trialkoxysilane, a trichlorosilane, a dialkoxysilane, and a dichlorosilane, with a compound of the general formula R1R2R4MR5, wherein R1, R2 and R4 are independently an aryl, alkyl, alkenyl, epoxy or alkynyl group, wherein at least one of R1, R2 and R4 is fully or partially fluorinated, wherein M is selected from group 14 of the periodic table, and wherein R5 is either an alkoxy group, OR3 or a halogen, X, followed by depositing the material on the MEMS device, followed by depositing the material on the movable structure and/or the stationary structure.
Dependencies are inferred from the claim text.