Semiconductor device having SOI structure including a load resistor of an sram memory cell

A semiconductor device having an SOI structure including a semiconductor substrate a buried insulating layer and an SOI layer, comprising:

• a MOS transistor provided in said SOI layer, said MOS transistor including,
• source and drain regions formed in said SOI layer, respectively,
• a gate electrode thorough a gate oxide film on region of said SOI layer between said source and drain regions, and
• first and second semiconductor regions of a predetermined same conductivity type provided in an element formation region of said SOI layer;
• and
• a partial insulating film thicker than said gate oxide film formed between said first and second semiconductor regions, and partially formed in an upper portion of said element formation region and a partial insulating film lower semiconductor region of a predetermined conductivity type to be a part of said element formation region in a lower portion of said element formation region,
• wherein said partial insulating film lower semiconductor region is electrically connected to said first and second semiconductor regions to constitute a resistive element, and said resistive element includes a load resistor of an SRAM memory cell.