Rare earth element-doped silicon/silicon dioxide lattice structure
AssigneeSharp Laboratories of America, Inc.
InventorsTingkai Li, Wei Gao, Yoshi Ono, Sheng Teng Hsu
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AssigneeSharp Laboratories of America, Inc.
InventorsTingkai Li, Wei Gao, Yoshi Ono, Sheng Teng Hsu
Estimating the term…
Provided are an electroluminescence (EL) device and corresponding method for forming a rare earth element-doped silicon (Si)/Si dioxide (SiO2) lattice structure. The method comprises: providing a substrate; DC sputtering a layer of amorphous Si overlying the substrate; DC sputtering a rare earth element; in response, doping the Si layer with the rare earth element; DC sputtering a layer of SiO2 overlying the rare earth-doped Si; forming a lattice structure; annealing; and, in response to the annealing, forming nanocrystals in the rare-earth doped Si having a grain size in the range of 1 to 5 nanometers (nm). In one aspect, the rare earth element and Si are co-DC sputtered. Typically, the steps of DC sputtering Si, DC sputtering the rare earth element, and DC sputtering the SiO2 are repeated 5 to 60 cycles, so that the lattice structure includes the plurality (5-60) of alternating SiO2 and rare earth element-doped Si layers.
A method for forming a rare earth element-doped silicon (Si)/Si dioxide (SiO2) lattice structure, the method comprising:
A method for forming an electroluminescence (EL) device, the method comprising:
A rare earth element-doped silicon (Si)/Si dioxide (SiO2) lattice structure, the structure comprising:
An electroluminescence device comprising:
A rare earth element-doped silicon (Si)/Si dioxide (SiO2) lattice structure, the structure comprising:
Dependencies are inferred from the claim text.