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US 7,256,419 B2Granted
Composition for forming organic insulating film and organic insulating film formed from the same
AssigneeSamsung Electronics Co., Ltd.
InventorsEun Jeong Jeong, Bon Won Koo, Joo Young Kim, In Nam Kang
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Abstract
Disclosed herein is a composition for forming an organic insulating film and an organic insulating film formed from the composition. An exemplary composition comprises an insulating polymer having a maleimide structure, a crosslinking agent and a photoacid generator so as to form a crosslinked structure. The organic insulating film has excellent chemical resistance to organic solvents used in a subsequent photolithographic process and can improve the electrical properties of transistors.
Claims8
A composition for forming an organic insulating film, comprising:
- (i) an organic insulating polymer represented by Formula 1 or 2 below:
- wherein substituents R′ are each independently a hydrogen atom, a hydroxyl group, an ester group, an amide group, a C1˜12 alkyl or alkoxy group, a C6˜30 aromatic group, or a C3˜30 heteroaromatic group, and the aromatic or heteroaromatic group may be substituted with at least one group selected from hydroxyl, ester, amide, C1˜12 alkyl and alkoxy, and amine groups;
- n is a real number between 0.1 and 1;
- m is a real number between 0 and 0.9;
- and the sum of n and m is 1, or
- wherein R is a C6˜30 aromatic or C3˜30 heteroaromatic group, and the aromatic group and the heteroaromatic group may be substituted with at least one group selected from C1˜12 alkyl and alkoxy, and amine groups;
- substituents R″ are each independently a hydrogen atom, a hydroxyl group, an ester group, an amide group, a C1˜12 alkyl or alkoxy group, a C6˜30 aromatic group or a C3˜30 heteroaromatic group, and the aromatic group and the heteroaromatic group may be substituted with at least one group selected from hydroxyl, ester, amide, C1˜12 alkyl and alkoxy, and amine groups, with the proviso that at least one R″ is a hydroxyl group;
- n is a real number between 0.1 and 0.9;
- m is a real number between 0.1 and 0.9;
- and the sum of n and mis 1;
- (ii) a crosslinking agent;
- (iii) a photoacid generator;
- and
- (iv) a solvent.
11 more elements
Dependencies are inferred from the claim text.