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US 7,256,400 B2Granted
Electron beam inspection apparatus
AssigneeHitachi High-Technologies Corporation
InventorsMasakazu Takahashi, Satoru Yamaguchi, Masashi Sakamoto
Life of this patent
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AssigneeHitachi High-Technologies Corporation
InventorsMasakazu Takahashi, Satoru Yamaguchi, Masashi Sakamoto
Estimating the term…
An electron beam inspection apparatus in which the order of inspection is determined to shorten the inspection time is disclosed. The order of inspection is determined by minimizing the total of the moving time and the inspection time as well as by simply optimizing the covered distance. At the time of preparing a recipe to determine the inspection points and the order of inspection, the sequence of a series of inspection points sequentially inspected is changed to optimize the order of inspection. Not only the sequence which minimizes the covered distance is determined but also the order of inspection of the inspection points is optimized in accordance with the charged state, warping of the wafer, the delivery position and other situations.
An electron beam inspection apparatus comprising a controllable sample stage and having the function to automatically inspect a plurality of inspection points in a predetermined order and output the inspection result, the apparatus further having the calculation function to shorten the total inspection time by changing the order in which the inspection points are moved, wherein:
An electron beam inspection apparatus comprising a controllable sample stage and having the function to automatically inspect a plurality of inspection points in a predetermined order and output the inspection result, the apparatus further having the calculation function to shorten the total inspection time by changing the order in which the inspection points are moved, and the apparatus having the function to shorten the total inspection time by moving the sample along the height distribution thereof.
An electron beam inspection apparatus comprising a controllable sample stage and having the function to automatically inspect a plurality of inspection points in a predetermined order and output the inspection result, the apparatus further having the calculation function to shorten the total inspection time by changing the order in which the inspection points are moved, and the apparatus having the function to shorten the total inspection time by moving the sample along the surface potential distribution thereof.
Dependencies are inferred from the claim text.