Fluorine-containing vinyl ethers, their polymers, and resist compositions using such polymers
AssigneeCentral Glass Company, Limited
InventorsSatoru Kobayashi, Kazuhiko Maeda, Tooru Tsujishita
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Abstract
A fluorine-containing vinyl ether represented by formula 1, wherein R represents an organic group containing at least one fluorine atom and a cyclic structure is provided. A fluorine-containing copolymer containing (a) a first unit derived from a first monomer that is a fluorine-containing vinyl ether represented by formula 8: where R1 is —H or a C1-C8 alkyl group that optionally contains an oxygen atom; and (b) a second unit derived from a second monomer that is at least one selected from acrylic esters and methacrylic esters is also provided.
Claims19
A fluorine-containing vinyl ether, which is represented by the formula 2,
- where R1 is at least one substituent selected from the group consisting of —F, —CF3, and —R2C(CF3)2OR3, where R2 is CH2 or C2H4, and R3 is H or an acid-labile protecting group, and
- p is an integer of 1-5, and m is 0 or 1.
A fluorine-containing vinyl ether, which is represented by the formula 3,
- where R1 is at least one substituent selected from the group consisting of —F, —CF3, and —R2C(CF3)2OR3, where R2 is CH2 or C2H4, and R3 is H or an acid-labile protecting group, and
- q is an integer of 1-4, and m is 0 or 1.
A fluorine-containing vinyl ether, which is represented by the formula 5,
- where n is an integer of 1-8.
A fluorine-containing vinyl ether, which is represented by the formula 6,
- where R5 is a C0-C5 alkyl group, and n is an integer of 1-8.
A fluorine-containing copolymer comprising:
- a first unit derived from a first monomer that is a fluorine-containing vinyl ether represented by the formula 8:
- where R1 is —H or a C1-C8 alkyl group that optionally contains an oxygen atom;
- and
- a second unit derived from a second monomer that is at least one selected from the group consisting of acrylic esters and methacrylic esters.
Dependencies are inferred from the claim text.