Droplet jetting apparatus, method of operating droplet jetting apparatus, and device manufacturing method
AssigneeSeiko Epson Corporation
InventorHidenori Usuda
Life of this patent
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AssigneeSeiko Epson Corporation
InventorHidenori Usuda
Estimating the term…
A droplet jetting apparatus having a droplet jetting head including a nozzle opening formed in a nozzle formation surface, from which droplets of a predetermined liquid are jetted, and a capping device for capping the nozzle opening of the head. A moisture retentive liquid supply device connected to the capping device is provided for supplying a moisture retentive liquid with respect to the predetermined liquid to a space formed by the nozzle formation surface and the capping portion. The weight and the size of the head and its periphery, which is a movable body, are not specifically increased, and accordingly, increase in the cost for motors for driving the droplet jetting head is prevented, thereby effectively avoiding clogging in the nozzle opening of the droplet jetting head. In addition, it is unnecessary to move the droplet jetting head when the moisture retentive liquid is supplied.
A droplet jetting apparatus having a droplet jetting head which includes a nozzle opening from which droplets of a predetermined liquid are jetted and which is formed in a nozzle formation surface, and a capping device for capping at least the nozzle opening of the droplet jetting head, the apparatus comprising:
A method of operating a droplet jetting apparatus which includes a droplet jetting head which includes a nozzle opening from which droplets of a predetermined liquid are jetted and which is formed in a nozzle formation surface, a capping device for capping at least the nozzle opening of the droplet jetting head, and a moisture retentive liquid supply device for supplying a moisture retentive liquid with respect to the predetermined liquid to a space formed by the nozzle formation surface and the capping portion, wherein:
A device manufacturing method for manufacturing a device which includes a work on which a functional pattern is formed in a predetermined area, the method comprising:
Dependencies are inferred from the claim text.