Method for the manufacture of a piezoelectric element
AssigneeSeiko Epson Corporation
InventorMasami Murai
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Abstract
A piezoelectric element with stable and excellent piezoelectric properties is made by: a step of forming a diaphragm 30 (31, 32) on a substrate 20 (S1); a step of forming a bottom electrode 33 on the diaphragm 30 (S2); a step of forming a first piezoelectric layer 43a on the bottom electrode 33 (S3); a step of patterning both the piezoelectric layer 43a and the bottom electrode 33 (S4); a step of forming a second piezoelectric layer on the piezoelectric layer 43a and on the diaphragm 30 to mature a piezoelectric film 43 (S5); and a step of forming a top electrode 44 on the piezoelectric film 43 (S6).
Claims4
A method for the manufacture of a piezoelectric element, comprising:
- a step of forming a diaphragm on a substrate;
- a step of forming a bottom electrode on said diaphragm;
- a step of forming a first Ti layer on said bottom electrode;
- a step of patterning said bottom electrode to a prescribed shape;
- a step of forming a second Ti layer on the bottom electrode that was left by said patterning, and on said diaphragm from which the bottom electrode was removed;
- a step of forming a piezoelectric film on the bottom electrode on which said second Ti layer was formed;
- and
- a step of forming a top electrode on said piezoelectric film.
Dependencies are inferred from the claim text.