Smart component-based management techniques in a substrate processing system

In a substrate processing system having a set of components, at least a plurality of components of said set of components being designated to be smart components, each component of said plurality of components having an intelligent component enhancement (ICE), a method of component managment, comprising:

• querying, via a transducer, a first component of said plurality of components to obtain first calibration data, said first calibration data being obtained using one of a first technique and a second technique, said first technique involving obtaining said first calibration data from an ICE associated with said first component, said second technique involving obtaining unique identifying data from said ICE and employing said unique identifying data to obtain said first calibration data from a data store external to said first component;
• employing said first calibration data in one of installing said substrate processing system and maintaining said substrate processing system.