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US 7,254,453 B2Granted
Secondary process controller for supplementing a primary process controller
AssigneeAdvanced Micro Devices, Inc.
InventorsRichard J. Markle, Thomas J. Sonderman
Life of this patent
Estimating the term…
Abstract
A method and an apparatus for implementing a multi-variate process control system. A workpiece is processed using a primary process control function during a first time period. A secondary process control function is performed during at least a portion of the first time period for processing of the workpiece. The secondary process control function is capable of modifying at least one secondary control parameter.
Claims36
A method, comprising:
- processing a workpiece using a primary process control function during a first time period;
- and
- performing a secondary process control function relating to said processing said workpiece during at least a portion of said first time period, wherein said secondary process control function is capable of modifying at least one secondary control parameter and wherein at least a portion of said secondary process control function is nested within said primary process control function.
An apparatus, comprising:
- means for processing a workpiece using a primary process control function during a first time period;
- and
- means for performing a secondary process control function relating to said processing said workpiece during at least a portion of said first time period for processing of said workpiece, wherein said secondary process control function is capable of modifying at least one secondary control parameter and wherein at least a portion of said secondary process control function is nested within said primary process control function.
A system, comprising:
- a processing tool to process a workpiece;
- a primary process controller operatively coupled to said processing tool, said primary process controller to process said workpiece using a primary process control function during a first time period;
- and
- a secondary process controller operatively coupled to said processing tool and to said primary process controller, said secondary process controller for performing a secondary process control function during at least a portion of said first time period for processing of said workpiece, wherein said secondary process control function is capable of modifying at least one secondary control parameter and wherein at least a portion of a function relating to said secondary process controller is nested within at least one portion of a function relating to said primary process controller.
1 more element
An apparatus, comprising:
- a primary process controller operatively coupled to a processing tool, said primary process controller to process a workpiece using a primary process control function during a first time period;
- and
- a secondary process controller operatively coupled to said processing tool and to said primary process controller, said secondary process controller for performing a secondary process control function during at least a portion of said first time period for processing of said workpiece, wherein said secondary process control function is capable of modifying at least one secondary control parameter and wherein at least a portion of a function relating to said secondary process controller is nested within at least one portion of a function relating to said primary process controller.
A computer readable program storage device encoded with instructions that, when executed by a computer, performs a method, comprising:
- processing a workpiece using a primary process control function during a first time period;
- and
- performing a secondary process control function relating to said processing said workpiece during at least a portion of said first time period for processing of said workpiece, wherein said secondary process control function is capable of modifying at least one secondary control parameter and wherein at least a portion of said secondary process control function is nested within said primary process control function.
Dependencies are inferred from the claim text.