Optoelectronic component with curved waveguide with inwardly sloped sides
AssigneeAvanex Corporation
InventorsJean-René Burie, Geneviève Glastre
Life of this patent
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Abstract
The invention concerns semiconductor optoelectronic components with ribbon-shaped waveguide supported by a substrate. According to the invention the ribbon includes lateral sides and a light output face, characterized by said ribbon including a portion curved by more than two degrees in relation to the normal to the light output face, and the lateral sides being inwardly sloped on the substrate. The optoelectronic component may be an electro-optical modulator, a semiconductor optical amplifier, a semiconductor laser or a Mach-Zehnder-type interferometer. The component may also be formed by joining two of these devices.
Claims16
A solid-state optoelectronic component with a waveguide in the form of a tape supported by a substrate which constitutes a layer of vertical optical confinement, the tape comprising:
- a light emerging end,
- side flanks sloping inwards on said substrate,
- a section curved by more than two degrees in relation to the perpendicular to the light emerging end, wherein side flanks in said curve section have a larger slope angle than side flanks in a straight section of said tape,
- a layer of optical confinement positioned above said substrate, and
- a contact layer positioned above said layer of optical confinement, wherein side flanks in said curve section have a larger slope angle than side flanks in a straight section of said tape.
A method for making a tape for an optoelectronic component, the method comprising:
- placing a mask on a component, the component comprising a substrate, an optical containment layer, a contact layer, wherein the substrate and the contact layer comprises arsenic and the mask defines at least one straight portion and at least one curved portion;
- removing a portion of the contact layer not protected by the mask by a ionic cleaning such that the component includes at least one straight portion and at least one curved portion, wherein the at least one curved portion is curved by more than two degrees in relation to the perpendicular to a light emerging end of the component;
- and
- soaking the component in a hydriodic acid to form inwardly sloping side flanks on the optical containment layer, wherein side flanks in said curved portion has a larger slope angle than side flanks in the straight portion.
A method for making tape for a solid-state optoelectronic component with a waveguide in the form of a tape supported by a substrate comprising arsenic, the tape comprising a light emerging end, side flanks sloping inwards on said substrate, a section curved in relation to the perpendicular to the light emerging end, wherein hydrogen iodide is used to make said sloping side flanks, wherein side flanks in said curve section have a larger slope angle than side flanks in a straight section of said tape.
Dependencies are inferred from the claim text.