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US 7,254,251 B2Granted
System and method of providing mask defect printability analysis
AssigneeSynopsys, Inc.
InventorsLynn Cai, Linard Karklin, Linyong Pang
Life of this patent
Estimating the term…
Abstract
A simulated wafer image of a physical mask and a defect-free reference image are used to generate a severity score for each defect, thereby giving a customer meaningful information to accurately assess the consequences of using a mask or repairing that mask. The defect severity score is calculated based on a number of factors relating to the changes in critical dimensions of the neighbor features to the defect. A common process window can also be used to provide objective information regarding defect printability. Certain other aspects of the mask relating to mask quality, such as line edge roughness and contact corner rounding, can also be quantified by using the simulated wafer image of the physical mask.
Claims8
A physical mask comprising:
- at least one defect being unmodified based on a first average critical dimension deviation and a first maximum critical dimension deviation provided from analyzing a simulated wafer image of the physical mask and a simulated wafer image of the reference mask, the reference mask corresponding to a defect-free physical mask;
- and
- at least one defect being modified based on a second average critical dimension deviation and a second maximum critical dimension deviation provided from analyzing the simulated wafer images of the physical mask and the reference mask.
A physical mask comprising:
- at least one defect being modified based on a first average critical dimension deviation and a first maximum critical dimension deviation provided from analyzing a simulated wafer image of the physical mask and a simulated wafer image of a reference mask, the reference mask corresponding to a defect-free physical mask;
- and
- at least one defect being unmodified based on a second average critical dimension deviation and a second maximum critical dimension deviation provided from analyzing the simulated wafer images of the physical mask and the reference mask.
A physical mask comprising:
- at least one irregularity being unmodified based on a first average critical dimension deviation and a first maximum critical dimension deviation provided from analyzing a simulated wafer image of the physical mask and a simulated wafer image of the reference mask, the reference mask corresponding to a defect-free physical mask;
- and
- at least one irregularity being modified based on a second average critical dimension deviation and a second maximum critical dimension deviation provided from analyzing the simulated wafer images of the physical mask and the reference mask.
A physical mask comprising:
- at least one irregularity being modified based on a first average critical dimension deviation and a first maximum critical dimension deviation provided from analyzing a simulated wafer image of the physical mask and a simulated wafer image of a reference mask, the reference mask corresponding to a defect-free physical mask;
- and
- at least one irregularity being unmodified based on a second average critical dimension deviation and a second maximum critical dimension deviation provided from analyzing the simulated wafer images of the physical mask and the reference mask.
A physical mask comprising:
- at least one feature being unmodified based on a first average critical dimension deviation and a first maximum critical dimension deviation provided by comparing a simulated wafer image of the physical mask and a simulated wafer image of a reference mask, the reference mask corresponding to a defect-free physical mask;
- and
- at least one feature being modified based on a second average critical dimension deviation and a second maximum critical dimension deviation provided by comparing the simulated wafer images of the physical mask and the reference mask.
A physical mask comprising:
- at least one feature being modified based on a first average critical dimension deviation and a first maximum critical dimension deviation provided by comparing a simulated wafer image of the physical mask and a simulated wafer image of a reference mask, the reference mask corresponding to a defect-free physical mask;
- and
- at least one feature being unmodified based on a second average critical dimension deviation and a second maximum critical dimension deviation provided by comparing the simulated wafer images of the physical mask and the reference mask.
An integrated circuit fabricated using a physical mask comprising:
- at least one feature being unmodified based on a first average critical dimension deviation and a first maximum critical dimension deviation provided by comparing a simulated wafer image of the physical mask and a simulated wafer image of a reference mask, the reference mask corresponding to a defect-free physical mask;
- and
- at least one feature being modified based on a second average critical dimension deviation and a second maximum critical dimension deviation provided by comparing the simulated wafer images of the physical mask and the reference mask.
An integrated circuit fabricated using a physical
- mask comprising:
- at least one feature being modified based on a first average critical dimension deviation and a first maximum critical dimension deviation provided by comparing a simulated wafer image of the physical mask and a simulated wafer image of a reference mask, the reference mask corresponding to a defect-free physical mask;
- and
- at least one feature being unmodified based on a second average critical dimension deviation and a second maximum critical dimension deviation provided by comparing the simulated wafer images of the physical mask and the reference mask.
1 more element
Dependencies are inferred from the claim text.