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US 7,253,970 B2Granted
Reflective optical system
AssigneeNova Measuring Instruments Ltd.
InventorsDavid Scheiner, Michael Winik, Yakov Lyubchik
Life of this patent
Estimating the term…
Abstract
A lens arrangement is presented. The lens arrangement comprises a first element having a concave reflective surface and defining an optical axis of the lens arrangement, and a second substantially flat and at least partially reflective element spaced-apart from the first element along the optical axis. The second element is configured to allow light passage therethrough and is oriented with respect to the optical axis and the first element such that at a predetermined angle of incidence of an input light beam onto the second element, the input light beam is reflected onto the reflective surface of the first element and reflected therefrom to pass through the second element.
Claims50
A lens arrangement comprising:
- a first element having a concave reflective surface and defining an optical axis of the lens arrangement, and a second substantially flat and at least partially reflective element spaced-apart from the first element along the optical axis, the second element being configured to allow light passage therethrough and being oriented with respect to the optical axis and the first element such that at a predetermined angle of incidence of an input light beam onto the second element, the input light beam is reflected onto the reflective surface of the first element and reflected therefrom to pass through the second element,
- wherein the second element is an apertured mirror oriented such that the optical axis passes through the aperture, and at the predetermined angle of incidence of the input light beam onto the reflective surface of the second element, the input light beam is reflected onto the reflective surface of the first element and reflected therefrom towards the aperture in the second element, and
- wherein the aperture has a substantially conical geometry with a cone base being at an outer surface of the second element.
A lens arrangement comprising:
- a first element having a concave reflective surface and defining an optical axis of the lens arrangement, and a second substantially flat and at least partially reflective element spaced-apart from the first element along the optical axis, the second element being configured to allow light passage therethrough and being oriented with respect to the optical axis and the first element such that at a predetermined angle of incidence of an input light beam onto the second element, the input light beam is reflected onto the reflective surface of the first element and reflected therefrom to pass through the second element,
- wherein the second element is an apertured mirror oriented such that the optical axis passes through the aperture, and at the predetermined angle of incidence of the input light beam onto the reflective surface of the second element, the input light beam is reflected onto the reflective surface of the first element and reflected therefrom towards the aperture in the second element,
- wherein an outer surface of the second element and its inner surface defined by the aperture are substantially anti-reflective, and
- wherein the aperture has a substantially conical geometry with a cone base being at an outer surface of the second element.
1 more element
A lens arrangement comprising:
- a first element having a concave reflective surface and defining an optical axis of the lens arrangement, and a second substantially flat and at least partially reflective element spaced-apart from the first element along the optical axis, the second element being configured to allow light passage therethrough and being oriented with respect to the optical axis and the first element such that at a predetermined angle of incidence of an input light beam onto the second element, the input light beam is reflected onto the reflective surface of the first element and reflected therefrom to pass through the second element,
- wherein the second element is an apertured mirror oriented such that the optical axis passes through the aperture, and at the predetermined angle of incidence of the input light beam onto the reflective surface of the second element, the input light beam is reflected onto the reflective surface of the first element and reflected therefrom towards the aperture in the second element,
- wherein an outer surface of the second element and its inner surface defined by the aperture are substantially light absorbing, and
- wherein the aperture has a substantially conical geometry with a cone base being at an outer surface of the second element.
1 more element
A lens arrangement comprising:
- a first element having a concave reflective surface and defining an optical axis of the lens arrangement, and a second substantially flat and at least partially reflective element spaced-apart from the first element along the optical axis, the second element being configured to allow light passage therethrough and being oriented with respect to the optical axis and the first element such that at a predetermined angle of incidence of an input light beam onto the second element, the input light beam is reflected onto the reflective surface of the first element and reflected therefrom to pass through the second element,
- wherein the second element is accommodated in a back focal plane of the first element.
A lens arrangement comprising:
- a first element having a concave reflective surface and defining an optical axis of the lens arrangement, and a second substantially flat and at least partially reflective element spaced-apart from the first element along the optical axis, the second element being configured to allow light passage therethrough and being oriented with respect to the optical axis and the first element such that at a predetermined angle of incidence of an input light beam onto the second element, the input light beam is reflected onto the reflective surface of the first element and reflected therefrom to pass through the second element,
- wherein the second element is an apertured mirror oriented such that the optical axis passes through the aperture, and at the predetermined angle of incidence of the input light beam onto the reflective surface of the second element, the input light beam is reflected onto the reflective surface of the first element and reflected therefrom towards the aperture in the second element, and
- wherein the second element is accommodated in a back focal plane of the first element.
A lens arrangement comprising:
- a first element having a concave reflective surface and defining an optical axis of the lens arrangement, and a second substantially flat and at least partially reflective element spaced-apart from the first element along the optical axis, the second element being configured to allow light passage therethrough and being oriented with respect to the optical axis and the first element such that at a predetermined angle of incidence of an input light beam onto the second element, the input light beam is reflected onto the reflective surface of the first element and reflected therefrom to pass through the second element,
- wherein the second element is an apertured mirror oriented such that the optical axis passes through the aperture, and at the predetermined angle of incidence of the input light beam onto the reflective surface of the second element, the input light beam is reflected onto the reflective surface of the first element and reflected therefrom towards the aperture in the second element,
- wherein an outer surface of the second element and its inner surface defined by the aperture are substantially anti-reflective, and
- wherein the second element is accommodated in a back focal plane of the first element.
1 more element
A lens arrangement comprising:
- a first element having a concave reflective surface and defining an optical axis of the lens arrangement, and a second substantially flat and at least partially reflective element spaced-apart from the first element along the optical axis, the second element being configured to allow light passage therethrough and being oriented with respect to the optical axis and the first element such that at a predetermined angle of incidence of an input light beam onto the second element, the input light beam is reflected onto the reflective surface of the first element and reflected therefrom to pass through the second element,
- wherein the second element is an apertured mirror oriented such that the optical axis passes through the aperture, and at the predetermined angle of incidence of the input light beam onto the reflective surface of the second element, the input light beam is reflected onto the reflective surface of the first element and reflected therefrom towards the aperture in the second element,
- wherein an outer surface of the second element and its inner surface defined by the aperture are substantially light absorbing, and
- wherein the second element is accommodated in a back focal plane of the first element.
1 more element
An optical system comprising an illuminator arrangement defining a first aperture stop of the system;
- a first reflective element having a concave reflective surface and defining an optical axis of light propagation;
- and a second substantially flat and at least partially reflective element spaced-apart from the first element along the optical axis, the second element being configured to allow light passage therethrough and being oriented with respect to the optical axis and the first element such that at a predetermined angle of incidence of an input light beam onto the second element, the input light beam is reflected onto the reflective surface of the first element and reflected therefrom to pass through the second element, said second element and said first aperture stop defined by the illuminator arrangement being located in conjugate planes.
An optical system comprising an illuminator arrangement and an objective lens arrangement;
- the illuminator arrangement comprising a light source assembly and an aperture assembly;
- the objective lens arrangement comprising a first element having a concave reflective surface and defining an optical axis of the lens arrangement, and a second at least partially reflective element spaced apart from the first element along the optical axis, the second element being configured to allow light passage therethrough and being oriented with respect to the optical axis and with respect to the first element such that at a predetermined angle of incidence of an input light beam onto the reflective surface of the second element, the input beam is reflected onto the reflective surface of the first element and reflected therefrom to pass through the second element, said aperture of the illuminator arrangement and said second element being located in conjugate planes.
Dependencies are inferred from the claim text.