Superconductor-based modulator for extreme ultraviolet (EUV)
AssigneeIntel Corporation
InventorsDavid L. Williams, Michael Goldstein
Life of this patent
Estimating the term…
Abstract
A superconductor-based modulator includes a superconductor coupled to a cold reservoir to receive extreme ultra-violet (EUV) light beams. The light beams are modulated by altering transmission and reflection properties of the superconductor. Magnetic field, temperature, or a combination of both, may be used to control the superconducting properties of the superconductor. The modulator may perform temporal, spatial, and grey-scale modulations. The surface of the superconductor may be patterned with heat or infrared radiation to facilitate light focusing.
Claims20
A method comprising:
- projecting extreme ultra-violet (EUV) light beams onto a material comprising a superconductor;
- and
- modulating the projected EUV light beams by controlling the superconductivity of the superconductor.
An apparatus comprising:
- an extreme ultra-violet (EUV) light source to project EUV light beams;
- and
- a modulator to modulate the EUV light beams projected onto the modulator, the modulator comprising a material comprising a superconductor coupled to a cold reservoir.
A system comprising:
- an extreme ultra-violet (EUV) light source to project EUV light beams;
- a modulator to modulate the EUV light beams projected onto the modulator, the modulator comprising a material comprising a superconductor coupled to a cold reservoir;
- and
- a switching device to control the superconductivity of the superconductor.
Dependencies are inferred from the claim text.