Method and apparatus for simultaneous 2-D and topographical inspection
AssigneeOrbotech Ltd.
InventorsGregory Toker, Andrei Brunfeld, Ilia Lutsker
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Abstract
Apparatus for sensing information regarding a surface including a first plurality of optical elements arranged to acquire two dimensional information about a surface, a second plurality of optical elements arranged to acquire topographical information about the surface, wherein the first plurality and the second plurality of optical elements are arranged to simultaneously provide the two dimensional information and the topographical information to at least partially non-overlapping portions of a single sensor array.
Claims29
Apparatus for sensing information regarding a surface, comprising:
- a first plurality of optical elements arranged to acquire two dimensional information about a surface;
- a second plurality of optical elements arranged to acquire height profile information about said surface;
- said first plurality and said second plurality of optical elements being arranged to simultaneously provide said two dimensional information and said height profile information to at least partially non-overlapping portions of a single sensor array;
- a first plurality of illumination optical elements arranged to illuminate a first portion of said surface with illumination suitable for acquiring two dimensional information about said surface;
- and
- a second plurality of illumination optical elements arranged to illuminate a second portion of said surface with illumination suitable for acquiring height profile information about said surface;
- wherein said second plurality of illumination optical elements comprises at least one light emitter arranged to illuminate a linear region on said surface from a direction generally perpendicular to said surface.
Apparatus for sensing information regarding a surface, comprising:
- a first plurality of optical elements arranged to acquire two dimensional information about a surface;
- and
- a second plurality of optical elements arranged to acquire height profile information about said surface during acquisition of said two dimensional information, said second plurality of optical elements comprising an illuminator illuminating a first portion of said surface from a direction being generally perpendicular to said surface.
Dependencies are inferred from the claim text.