US 7,253,709 B1 · RF MEMS switch with spring-loaded latching mechanism

Abstract

Apparatus for a micro-electro-mechanical switch that provides for latching switching action. The switch has a cantilever arm disposed on a substrate that can be moved in orthogonal directions for latching and unlatching. To latch the switch, the cantilever arm is moved back by a comb-drive actuator and then pulled down by electrodes disposed on the substrate and the cantilever arm. The comb-drive actuator switch is then released and the cantilever arm moves forward to be captured by a dove-tail structure on the substrate. When the voltage to the electrodes on the substrate and the cantilever arm is removed, the cantilever arm is held in place by the dove-tail structure. The switch is unlatched by actuating the comb-drive actuator to move the cantilever arm away from the dove-tail structure. The cantilever arm will then pop up once it is released from the dove-tail structure.

Claims17

Dependent claims

A micro-electro-mechanical switch comprising

a substrate, wherein the substrate has at least one recess with a tip receiving structure;
a cantilever structure disposed on the substrate, wherein the cantilever structure has a cantilever structure tip adapted to fit into the tip receiving structure;
a horizontal actuator having a cantilever horizontal actuator portion coupled to the cantilever structure and a substrate horizontal actuator portion disposed on the substrate;
and
a vertical actuator having a cantilever vertical actuator portion disposed on the cantilever structure and a substrate vertical actuator portion disposed on the substrate.

2 more elements

A method of switching comprising:

providing a cantilever structure coupled to a substrate by a spring structure, wherein the cantilever structure has at least a portion of the cantilever structure adapted to move generally parallel to a surface of the substrate and move generally perpendicular to the surface of the substrate;
applying a first voltage to move the at least a portion of the cantilever structure in a first direction parallel to the surface of the substrate by a first electrostatic attractive force;
after applying the first voltage, applying a second voltage to attract the at least a portion of the cantilever structure towards the surface of the substrate by a second electrostatic attractive force;
after applying the second voltage, removing the first voltage and having the at least a portion of the cantilever structure move in a direction generally opposite to the first direction due to a horizontal spring force from the spring structure;
and
after removing the first voltage, capturing a tip of the cantilever structure in a receiving structure provided in or on the substrate.

3 more elements

Dependencies are inferred from the claim text.

RF MEMS switch with spring-loaded latching mechanism

Life of this patent

RF MEMS switch with spring-loaded latching mechanism

Life of this patent

Abstract

Claims17