Probe card with tunable stage and at least one replaceable probe
AssigneeStar Technologies Inc.
InventorsChoon-Leong Lou, Mei-Shu Hsu
Life of this patent
Estimating the term…
Abstract
The present probe card comprises a circuit board, a platform fixed on the circuit board, a tunable stage positioned on the platform, a probe carrier positioned on the tunable stage and at least one probe positioned on the probe carrier. The tunable stage comprises a stationary part positioned on the platform, a movable part for loading the probe carrier and a driving mechanism connecting the stationary part and the movable part. The probe carrier is positioned on the movable part and the relative position between the probe on the probe carrier and a DUT can be adjusted by the driving mechanism.
Claims6
A probe card, comprising:
- a circuit board having at least one conductive through hole and at least one conductive wire;
- a platform positioned on the circuit board;
- a tunable stage positioned on the platform;
- a probe carrier positioned on the tunable stage;
- and
- at least one probe positioned on the probe carrier, wherein the tunable stage is configured to adjust the relative position between the probe and a device under test,
- wherein the circuit board comprises an aperture and the probe can electrically contact a device under test through the aperture, wherein the tunable stage comprises:
- a stationary part positioned on the platform;
- a movable part for loading the prober carrier;
- and
- a driving mechanism connecting the stationary part and the movable part for adjusting the relative position between the probe and a device under test.
Dependencies are inferred from the claim text.