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US 7,253,615 B2Granted
Microelectromechanical system sensor and method for using
AssigneeGeneral Electric Company
InventorsErtugrul Berkcan, Wei-Cheng Tian
Life of this patent
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Abstract
According to some embodiments, an apparatus includes a movable portion through which a sensing current is to be conducted. The movable portion might comprise, for example, a beam or plate suspended above a well in a Microelectromechanical System (MEMS) substrate. The apparatus may also include a sensing portion coupled to the movable portion, and the movable portion and/or sensing portion may move in a direction normal to the substrate in response to a magnetic field.
Claims20
An apparatus, comprising:
- a substrate having a surface;
- a fixed comb mounted to the substrate and disposed generally parallel to the substrate surface;
- a movable portion through which a sensing current is to be conducted;
- and
- a comb-like sensing portion coupled to the movable portion and interleaved with the fixed comb, wherein the movable portion moves in a direction normal to the substrate surface in response to a magnetic field to produce a measurement resulting from movement of fingers of the sensing portion with respect to the fixed comb in the normal direction.
2 more elements
An apparatus, comprising:
- a fixed comb;
- a movable portion through which a sensing current is to be conducted;
- and
- a comb-like sensing portion coupled to the movable portion and interleaved with the fixed comb, wherein the movable portion moves in response to a magnetic field in two orthogonal directions including a direction normal to a substrate to produce a measurement resulting from movement of fingers of the sensing portion with respect to the fixed comb in the normal direction.
1 more element
A method of sensing an electromagnetic value, comprising:
- providing a sensing current through a movable portion of a sensor, the movable portion comprising a comb-like portion interleaved with a fixed comb that is mounted to a substrate and generally parallel to a surface of the substrate;
- and
- measuring an electrical characteristic of the sensing portion coupled to the movable portion when the movable portion moves in a direction normal to the substrate surface in response to a magnetic field to produce a measurement resulting from movement of fingers of the sensing portion with respect to the fixed comb in the normal direction.
A system, comprising:
- a substrate having a surface;
- a fixed comb mounted to the substrate and disposed generally parallel to the substrate surface;
- a microelectromechanical system sensor, including:
- a movable portion through which a sensing current is to be conducted, and
- a comb-like sensing portion coupled to the movable portion and interleaved with the fixed comb, wherein the movable portion moves in a direction normal to the substrate surface in response to a magnetic field to produce a measurement resulting from movement of fingers of the sensing portion with respect to the fixed comb in the normal direction;
- and
- a sensor dependent device.
4 more elements
Dependencies are inferred from the claim text.