Magnetic field sensing device and a fabricating method of the same
AssigneeSamsung Electronics Co., Ltd.
InventorKyung-won Na
Life of this patent
Estimating the term…
Abstract
A magnetic field sensing device and a fabrication method of the same featuring an easy planarization process for a substrate and a simplified procedure by the benefit of a slim planarizing substance. The magnetic field sensing device includes a substrate with a well of a predetermined depth and a plurality of grooves being formed thereon and a magnetic substance formed on an inner surface of the well to be located on an upper portion of the grooves. A first coil is formed in the grooves, a second coil is formed on an upper portion of the magnetic substance and is electrically connected to the first coil and insulating films are interposed between the first and the second coil and the magnetic substance for insulating the first and the second coil from the magnetic substance.
Claims7
A magnetic field sensing device, comprising:
- a substrate with at least one well of a predetermined depth and a plurality of grooves being formed thereon;
- a magnetic substance formed on an inner surface of the well to be located on an upper portion of the grooves;
- a first coil formed in the grooves;
- a second coil formed on an upper portion of the magnetic substance and being electrically connected to the first coil;
- and
- insulating films interposed between the first and the second coil and the magnetic substance for insulating the first and the second coil from the magnetic substance.
Dependencies are inferred from the claim text.