Semiconductor device
AssigneeNEC Electronics Corporation
InventorShigeki Tsubaki
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AssigneeNEC Electronics Corporation
InventorShigeki Tsubaki
Estimating the term…
The semiconductor device comprises: a semiconductor substrate (N+ substrate 110) containing a first conductivity type impurity implanted therein; a second conductivity type impurity-implanted layer (P+ implanted layer 114) at relatively high concentration, formed on the semiconductor substrate (N+ substrate 110); a second conductivity type impurity epitaxial layer (P− epitaxial layer 111) at relatively low concentration, formed on the second conductivity type impurity-implanted layer (P+ implanted layer 114); and a field effect transistor 100 (N-channel type lateral MOSFET 100) composed of a pair of impurity diffusion regions (N+ source diffusion layer 115 and N− drain layer 116) provided in the second conductivity type impurity epitaxial layer (P− epitaxial layer 111) and a gate electrode 117 provided over a region sandwiched with the pair of impurity diffusion regions (N+ source diffusion layer 115 and N− drain layer 116).
A semiconductor device, comprising:
Dependencies are inferred from the claim text.