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US 7,253,417 B2Granted
Multi-axis compound lens, beam system making use of the compound lens, and method using the compound lens
AssigneeICT Integrated Circuit Testing Gesellschaft
InventorsJürgen Frosien, Pavel Adamec
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Abstract
The invention provides an optical system for a charged particle multi-beam system. The optical system comprises an electrostatic lens component and a magnetic lens component. The components are used to focus a plurality of charged particle beams in a separate opening for each of at least a plurality a charged particle beams traveling through the optical system.
Claims28
An optical system for a charged particle multi-beam system, comprising:
- an electrostatic lens component for a plurality of charged particle beams having at least two electrostatic sub-lenses;
- and
- a magnetic lens component for a plurality of charged particle beams having at least two magnetic sub-lenses, wherein the sub-lenses share a common excitation coil;
- wherein the electrostatic and the magnetic lens component form a multi-lens for a plurality of charged particle beams having at least two sub-lenses;
- and
- wherein each sub-lens comprises an opening for a charged particle beam and each sub-lens is adapted to focus a charged particle beam.
3 more elements
A method for focusing at least two charged particle beams on a specimen, comprising:
- providing an optical system comprising:
- an electrostatic lens component for a plurality of charged particle beams having at least two electrostatic sub-lenses;
- and
- a magnetic lens component for a plurality of charged particle beams having at least two magnetic sub-lenses;
- and
- at least two separate openings for each of the at least two charged particle beams traveling through the optical system;
- controlling a current for an excitation coil of the magnetic lens component, thereby focusing the at least two electron beams;
- and
- controlling at least two potentials of the electrostatic lens component, thereby focusing the at least two electron beams.
6 more elements
A multiple charged particle beam device, comprising;
- a charged particle beam source;
- a detector for detecting secondary particles;
- beam shaping means;
- a housing for the charged particle beam column, wherein the
- housing can be evacuated;
- at least one optical system comprising;
- an electrostatic lens component for a plurality of charged particle beams having at least two electrostatic sub-lenses;
- and
- a magnetic lens component for a plurality of charged particle beams having at least two magnetic sub-lenses, wherein the sub-lenses share a common excitation coil;
- wherein the electrostatic and the magnetic lens component form a multi-lens for a plurality of charged particle beams having at least two sub-lenses;
- wherein each sub-lens comprises an opening for a charged particle beam;
- and
- wherein each sub-lens is adapted to focus a charged particle beam;
- and at least one control unit for the at least one optical system.
11 more elements
Dependencies are inferred from the claim text.