Charge-control pre-scanning for e-beam imaging
AssigneeKLA-Tencor Technologies Corporation
InventorsKirk J. Bertsche, John Greene
Life of this patent
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Abstract
One embodiment described relates to a method of electron beam imaging of a target area of a substrate. An electron beam column is configured for charge-control pre-scanning using a primary electron beam. A pre-scan is performed over the target area. The electron beam column is re-configured for imaging using the primary electron beam. An imaging scan is then performed over the target area. Other embodiments are also described.
Claims18
A method of electron beam imaging of a target area of a substrate, the method comprising:
- configuring an electron beam column for charge-control pre-scanning using a primary electron beam;
- repeatedly performing a pre-scan a programmable plurality of M times over the target area;
- re-configuring the electron beam column for imaging using the primary electron beam;
- and
- performing an imaging scan over the target area.
An apparatus with an electron beam column for imaging a target area of a substrate, the apparatus comprising:
- an electron source configured to generate electrons for an electron beam;
- condensing lenses configured to condense the electron beam into a tighter cross-section;
- scanning deflectors configured to deflect the electron beam over the target area;
- an objective lens for focusing the electron beam onto the target area;
- a detector configured to detect scattered electrons;
- and
- a controller programmed to sequentially i) configure the column for charge-control pre-scanning using the electron beam, ii) repeatedly perform pre-scanning a programmable plurality of M times over the target area, iii) re-configure the column for imaging using the electron beam, and iv) perform image scanning over the target area.
A method of electron beam imaging of a substrate, the method comprising:
- configuring an electron beam column for charge-control pre-scanning using a primary electron beam;
- performing a pre-scan over a single scan line;
- re-configuring the electron beam column for imaging using the primary electron beam;
- and
- performing an imaging scan over the single scan line.
Dependencies are inferred from the claim text.