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US 7,253,399 B2Granted
Solid-state image sensor, manufacturing method for solid-state image sensor, and camera
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsHiroshi Sakoh, Masato Kobayashi, Nobukazu Teranishi
Life of this patent
Estimating the term…
Abstract
A solid-state image sensor includes a plurality of light-receiving elements arranged in a light-receiving area, and a plurality of micro-lenses corresponding to the light-receiving elements, and has a flattening film formed on the plurality of the micro-lenses. At a center of the light-receiving area, the micro-lenses are placed in positions directly above corresponding photodiodes, and placed in positions which are progressively offset from positions directly above the corresponding photodiodes, towards a center of the light receiving area, as micro-lenses are located farther from the center of the light-receiving area.
Claims28
A solid-state image sensor comprising:
- light-receiving elements arranged in a light-receiving area;
- micro-lenses corresponding to the light-receiving elements;
- in-layer lenses between said micro-lenses and said light-receiving elements;
- and
- a flattening film on said micro-lenses,
- wherein, in a central portion of said light-receiving area a corresponding one of said micro-lenses is directly above a corresponding one of said light-receiving elements, and in other portions of said light-receiving area corresponding ones of said micro-lenses are offset from directly above corresponding ones of said light-receiving elements towards a center of said light receiving area by an amount that is increased as said other portions are increased in distance from the center of said light receiving area, and
- wherein, in said central portion of said light-receiving area a corresponding one of said in-layers lenses is directly above said corresponding one of said light-receiving elements, and in said other portions of said light-receiving area corresponding area corresponding ones of said in-layers are offset from directly above said corresponding ones of said light receiving elements towards the center of said light receiving area by an amount that is increased as said other portions are increased in distance from the center of said light receiving area,
- with the amount of offset of each of said corresponding ones of said micro-lenses being greater than the amount of offset of a respective one of said corresponding ones of said in-layer lenses.
5 more elements
A method for manufacturing a solid-state image sensor, comprising:
- forming in-layer lenses above light-receiving elements in a light-receiving area such that, in a central portion of said light-receiving area a corresponding one of said in-layer lenses is directly above a corresponding one of said light-receiving elements, and in other portions of said light-receiving area corresponding ones of said in-layer lenses are offset from directly above corresponding ones of said light-receiving elements towards a center of said light receiving area by an amount that is increased as said other portions are increased in distance from the center of said light receiving area;
- forming micro-lenses above said in-layer lenses such that, in said central portion of said light-receiving area a corresponding one of said micro-lenses is directly above said corresponding one of said light-receiving elements, and in said other portions of said light-receiving area corresponding ones of said micro-lenses are offset from directly above said corresponding ones of said light-receiving elements towards the center of said light receiving area by an amount that is increased as said other portions are increased in distance from the center of said light receiving;
- and
- forming a flattening film on said micro-lenses,
- wherein the amount of offset of each of said corresponding ones of said micro-lenses is greater than the amount of offset of a respective one of said corresponding ones of said in-layer lenses.
2 more elements
A camera comprising:
- a solid-state image sensor including light-receiving elements arranged in a light-receiving area, micro-lenses corresponding to said light-receiving elements, in-layer lenses between said micro-lenses and said light-receiving elements, and a flattening film on said micro-lenses,
- wherein, in a central portion of said light-receiving area a corresponding one of said micro-lenses is directly above a corresponding one of said light-receiving elements, and in other portions of said light-receiving area corresponding ones of said micro-lenses are offset from directly above corresponding ones of said light-receiving elements towards a center of said light receiving area by an amount that is increased as said other portions are increased in distance from the center of said light receiving area, and
- wherein, in said central portion of said light-receiving area a corresponding one of said in-layer lenses is directly above said corresponding one of said light-receiving elements, and in said other portions of said light-receiving area corresponding ones of said in-layer lenses are offset from directly above said corresponding ones of said light-receiving elements towards the center of said light receiving area by an amount that is increased as said other portions are increased in distance from the center of said light receiving area,
- with the amount of offset of each of said corresponding ones of said micro-lenses being greater than the amount of offset of a respective one of said corresponding ones of said in-layer lenses.
1 more element
A solid-state image sensor comprising:
- light-receiving elements arranged in a light-receiving area;
- micro-lenses corresponding to said light-receiving elements;
- in-layer lenses between said micro-lenses and said light-receiving elements;
- and
- a flattening film on said micro-lenses,
- wherein, in a central portion of said light-receiving area a corresponding one of said micro-lenses is directly above a corresponding one of said light-receiving elements, and in a portion of said light-receiving area that is closer to a periphery of said light-receiving area than a center of said light-receiving area corresponding ones of said micro-lenses are offset from directly above corresponding ones of said light-receiving elements towards the center of said light receiving area, and
- wherein, in said central portion of said light-receiving area a corresponding one of said in-layer lenses is directly above said corresponding one of said light-receiving elements, and in said portion of said light-receiving area that is closer to the periphery of said light-receiving area than the center of said light-receiving area corresponding ones of said in-layer lenses are offset from directly above said corresponding ones of said light-receiving elements towards the center of said light receiving area,
- with an amount of offset of each of said corresponding ones of said micro-lenses being greater than an amount of offset of a respective one of said corresponding ones of said in-layer lenses.
5 more elements
A camera comprising:
- a solid-state image sensor including light-receiving elements arranged in a light-receiving area, micro-lenses corresponding to said light-receiving elements, in-layer lenses between said micro-lenses and said light-receiving elements, and a flattening film on said micro-lenses,
- wherein, in a central portion of said light-receiving area a corresponding one of said micro-lenses is directly above a corresponding one of said light-receiving elements, and in a portion of said light-receiving area that is closer to a periphery of said light-receiving area than a center of said light-receiving area corresponding ones of said micro-lenses are offset from directly above corresponding ones of said light-receiving elements towards the center of said light receiving area, and
- wherein, in said central portion of said light-receiving area a corresponding one of said in-layer lenses is directly above said corresponding one of said light-receiving elements, and in said portion of said light-receiving area that is closer to the periphery of said light-receiving area than the center of said light-receiving area corresponding ones of said in-layer lenses are offset from directly above said corresponding ones of said light-receiving elements towards the center of said light receiving area,
- with an amount of offset of each of said corresponding ones of said micro-lenses being greater than an amount of offset of a respective one of said corresponding ones of said in-layer lenses.
1 more element
Dependencies are inferred from the claim text.