Deposition methods

A deposition method, comprising:

• providing a substrate within a reaction chamber, the substrate having a first surface and a second surface;
• providing a first semiconductor material precursor having a first activation time associated therewith for forming first semiconductor material over the first surface and a second activation time associated therewith for forming first semiconductor material over the second surface, the second activation time being longer than the first activation time;
• providing a pulse of the first semiconductor material precursor within the chamber, the pulse being maintained in the chamber for a time longer than the first activation time associated with the first semiconductor material precursor and no greater than the second activation time associated with the first semiconductor material precursor to selectively form the first semiconductor material from the semiconductor material precursor over the first surface relative to the second surface, the first semiconductor material having a third surface;
• providing a second semiconductor material precursor having a first activation time associated therewith for forming second semiconductor material over the third surface and a second activation time associated therewith for forming second semiconductor material over the second surface, the second activation time associated with the second semiconductor material precursor being longer than the first activation time associated with the second semiconductor material precursor;
• and
• providing a pulse of the second semiconductor material precursor within the chamber, the pulse being maintained in the chamber for a time longer than the first activation time associated with the second semiconductor material precursor and no greater than the second activation time associated with the second semiconductor material precursor to selectively form the second semiconductor material over the third surface relative to the second surface, the third surface not being etched prior to the formation of the second semiconductor material over the third surface.

A deposition method, comprising:

• providing a substrate, the substrate comprising a first surface and a second surface;
• the first surface comprising monocrystalline first semiconductor material and the second surface consisting essentially of electrically insulative material;
• first exposing the first and second surfaces to at least one semiconductor material precursor under conditions in which growth of second semiconductor material from the at least one precursor over the first and second surfaces comprises a lag phase period prior to a growth phase, and under which it takes longer for the growth phase to initiate on the second surface than on the first surface;
• the first exposing being conducted for long enough for the growth phase to occur on the first surface, but not for long enough for the growth phase to substantially occur on the second surface;
• the growth phase on the first surface forming the second semiconductor material over the first surface;
• the second semiconductor material having a third surface;
• second exposing the second and third surfaces to at least one semiconductor material precursor under conditions in which growth of third semiconductor material from the at least one precursor over the second and third surfaces comprises a lag phase period prior to a growth phase, and under which it takes longer for the growth phase to initiate on the second surface than on the third surface;
• the second exposing being conducted for long enough for the growth phase to occur on the third surface, but not for long enough for the growth phase to substantially occur on the second surface;
• the growth phase on the third surface forming the third semiconductor material over the third surface;
• and
• wherein there is no etching of the third surface between the first exposing and the second exposing.