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US 7,253,011 B2Granted
Fabrication method of semiconductor integrated circuit device
AssigneesRenesas Technology Corp., Hitachi Hokkai Semiconductor, Ltd.
InventorsOsamu Takahashi, Kunio Ogasawara
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Abstract
Provided is a fabrication method of a semiconductor integrated circuit device, which comprises disposing, in a ultrapure water preparing system, UF equipment having therein a UF module which has been manufactured by disposing, in a body thereof, a plurality of capillary hollow fiber membranes composed of a polysulfone membrane or polyimide membrane, bonding the plurality of hollow fiber membranes at end portions thereof by hot welding, and by this hot welding, simultaneously adhering the hollow fiber membranes to the body. Upon preparation of ultrapure water to be used for the fabrication of the semiconductor integrated circuit device, the present invention makes it possible to prevent run-off of ionized amine into the ultrapure water.
Claims38
A method of fabrication of a semiconductor integrated circuit device, comprising the steps of:
- (a) introducing first water into a first water purifying system, and sending out first purified water from the first water purifying system;
- (b) introducing the first purified water into a second water purifying system having a pure water circulating loop, and sending out second purified water from a first supply point on the pure water circulating loop;
- and
- (c) feeding a first wet treatment apparatus with the second purified water, thereby performing the first wet treatment to a wafer in the first wet treatment apparatus;
- step (b) including the sub-steps of:
- (b1) removing ions from the first purified water through use of a cation removing filter in the pure water circulating loop, the cation removing filter having a membrane sheet;
- and
- (b2) removing foreign particles from the first purified water which has passed through the cation removing filter through use of a heat welded ultrafiltration filter in the pure water circulating loop,
- wherein, from said second purified water that has been fed to said first wet treatment apparatus, an ionized amine or ionized amine substance has been removed to such an extent as not to affect the characteristics of the semiconductor integrated circuit device to be fabricated using said second purified water.
6 more elements
A method of fabrication of a semiconductor integrated circuit device, comprising the steps of:
- (a) introducing first water into a first water purifying system, and sending out first purified water from the first water purifying system;
- (b) introducing the first purified water into a second water purifying system having a pure water circulating loop, and sending out second purified water from a first supply point on the pure water circulating loop;
- and
- (c) feeding a first wet treatment apparatus with the second purified water, thereby performing a first wet treatment to a wafer in the first wet treatment apparatus, wherein said second purified water fed to said first wet treatment apparatus is sufficiently free of ionized amine or ionized amine substance so as not to affect characteristics of the semiconductor integrated circuit device to be fabricated using said second purified water;
- step (b) including the sub-steps of:
- (b1) removing foreign particles from the first purified water through use of an ultrafiltration filter in the pure water circulating loop;
- and
- (b2) removing ions from said first purified water which has passed through said ultrafiltration filter, by use of a cation removing filter in the pure water circulating loop, the cation removing filter having a membrane sheet.
5 more elements
A method of fabrication of a semiconductor integrated circuit device, comprising the steps of:
- (a) introducing first water into a first water purifying system, and sending out first purified water from the first water purifying system;
- (b) introducing the first purified water into a second water purifying system having a pure water circulating loop, and sending out second purified water from a first supply point on the pure water circulating loop;
- and
- (c) feeding a first wet treatment apparatus with the second purified water, thereby performing a first wet treatment to a wafer in the first wet treatment apparatus, wherein said second purified water fed to said first wet treatment apparatus is sufficiently free of ionized amine or ionized amine substance so as not to affect characteristics of the semiconductor integrated circuit device to be fabricated using said second purified water;
- step (b) including the sub-steps of:
- (b1) removing ions from the first purified water through use of an ion removing filter disposed in said pure water circulating loop, the ion removing filter having a membrane sheet, and
- (b2) causing the first purified water, which has passed through said ion removing filter, to pass through a heat welded type ultrafiltration filter disposed in said pure water circulating loop, thereby removing foreign particles, wherein the first purified water passes through the ion removing filter before passing through the ultrafiltration filter.
4 more elements
A method of fabrication of a semiconductor integrated circuit device, comprising the steps of:
- (a) introducing first water into a first water purifying system, and sending out first purified water from the first water purifying system;
- (b) introducing the first purified water into a second water purifying system having a pure water circulating loop, and sending out second purified water from a first supply point on the pure water circulating loop;
- and
- (c) feeding a first wet treatment apparatus with the second purified water, thereby performing a first wet treatment to a wafer in the first wet treatment apparatus;
- step (b) including the sub-step of:
- (b1) removing ions from the first purified water through use of a cation removing filter in the pure water circulating loop, the cation removing filter having a membrane sheet,
- wherein, from said second purified water that has been fed to said first wet treatment apparatus, an ionized amine or ionized amine substance has been removed to such an extent as not to affect characteristics of the semiconductor integrated circuit device to be fabricated using said second purified water.
4 more elements
A method of fabrication of a semiconductor integrated circuit device, comprising the steps of:
- (a) introducing first water into a first water purifying system, and sending out first purified water from the first water purifying system;
- (b) introducing the first purified water into a second water purifying system having a pure water circulating loop, thereby to form second purified water;
- and
- (c) feeding a first wet treatment apparatus with the second purified water, thereby performing a first wet treatment to a wafer in the first wet treatment apparatus;
- step (b) including the sub-step of:
- (b1) removing foreign particles from the first purified water through use of a heat welded ultrafiltration filter in the pure water circulating loop, wherein, from said second purified water that has been fed to said first wet treatment apparatus, an ionized amine or ionized amine substance has been removed to such an extent as not to affect characteristics of the semiconductor integrated circuit device to be fabricated using said second purified water.
3 more elements
Dependencies are inferred from the claim text.