Increasing adhesion in an imprinting procedure

A method for increasing adhesion between a substrate and a polymeric imprintable material during an imprinting procedure, the method comprising:

• chemically bonding a plurality of molecules to a surface of the substrate to form a self-assembled monolayer thereon, wherein each of the plurality of molecules includes a self-assembling connecting group at one end and a linking group at an opposed end;
• copolymerizing a monomer with the self-assembled monolayer to form the polymeric imprintable material chemically bonded to the self-assembled monolayer;
• and
• forming at least one of hydroxyl groups, chlorine groups, amino groups, thiol groups, or acetoxy groups on the surface of the substrate prior to chemically bonding the plurality or molecules;
• wherein the at least one of the hydroxyl groups, chlorine groups, amino groups, thiol groups, or acetoxy groups is adapted to chemically bond to at least one of the self-assembling connecting groups, and wherein adhesion between the polymeric imprintable material and the substrate Is substantially increased by the self-assembled monolayer.

A method for increasing adhesion between a substrate and a polymeric imprintable material during an imprinting procedure, the method comprising:

• chemically bonding a plurality of molecules to a surface of the substrate to form a self-assembled monolayer thereon;
• copolymerizing a monomer with the self-assembled monolayer to form the polymeric imprintable material chemically bonded to the self-assembled monolayer;
• and
• forming at least one of hydroxyl groups, chlorine groups, amino groups, thiol groups, or acetoxy groups on the surface of the substrate prior to chemically bonding the plurality of molecules;
• wherein the at least one of the hydroxyl groups, chlorine groups, amino groups, thiol groups, or acetoxy groups is adapted to chemically bond to the plurality of molecules, and wherein adhesion between the polymeric imprintable material and the substrate is substantially increased by the self-assembled monolayer.

A method for increasing adhesion between a substrate and a polymeric imprintable material during an imprinting procedure, the method comprising:

• chemically bonding a plurality of molecules to a surface of the substrate to form a self-assembled monolayer thereon;
• copolymerizing a monomer with the self-assembled monolayer to form the polymeric imprintable material chemically bonded to the self-assembled monolayer;
• and
• forming at least one of hydroxyl groups, chlorine groups, amino groups, thiol groups, or acetoxy groups on the surface of the substrate prior to chemically bonding the plurality of molecules;
• wherein the at least one of the hydroxyl groups, chlorine groups, amino groups, thiol groups, or acetoxy groups is adapted to chemically bond to at least one of the plurality of molecules, and wherein adhesion between the polymeric imprintable material and the substrate is substantially increased by the self-assembled monolayer, and wherein the plurality of molecules comprises at least one molecular species selected from methacryloxy propyltrichlorosilane, (methacryloyloxypropyl)trimethoxysilane, 3-methacryloxypropylbis(trimethylsiloxy)methoxysilane 3-methacryloxypropyldimethylchlorosilane 3-methacryloxypropylmethyldichlorosilane 3-methacryloxypropylmethyldimethoxysilane, 3-acryloxypropylmethyldichlorosilane, acryloxypropylmethyldimethoxysilane 3-acryloxypropyltrichlorosilane, acryloxypropyltrimethoxysilane, vinyltriacetoxysilane, vinylmethyldiethoxysilane, vinyltrichlorosilane, vinyltrimethoxysilane, vinylmethyldiacetoxysilane, hydroxyethyl methacrylate, hydroxyethyl acrylate, and mixtures thereof.

A method for increasing adhesion between a substrate and a polymeric imprintable material during an imprinting procedure, the method comprising:

• chemically bonding a plurality of molecules to a surface of the substrate to form a self-assembled monolayer thereon;
• and
• copolymerizing a monomer with the self-assembled monolayer to form the polymeric imprintable material comprising a resist polymer chemically bonded to the self-assembled monolayer;
• wherein adhesion between the polymeric imprintable material and the substrate is substantially increased by the self-assembled monolayer, and wherein the substrate is selected from silicon, silicon dioxide, glass, quartz, alumina, germanium, germanium oxide, tin, tin oxide, layers thereof, and combinations thereof.

A method for coating a substrate with a self-assembled monolayer for increasing adhesion between the substrate and a polymeric Imprintable material during an imprinting procedure, the method comprising:

• forming at least one hydroxyl group on a surface of the substrate;
• chemically bonding a plurality of molecules to a surface of the substrate to form a self-assembled monolayer thereon, each of the plurality of molecules having a self-assembling connecting group at one end and a linking group at an opposed end, wherein at least one self-assembling connecting group bonds with the at least one hydroxyl group;
• and
• copolymerizing a plurality of monomers with the linking groups to form the polymeric imprintable material chemically bonded to the self-assembled monolayer;
• wherein adhesion between the polymeric imprintable material and the substrate is substantially increased by the self-assembled monolayer.