Devices and methods for aligning a stamp and a substrate
AssigneeObducat AB
InventorsLennart Olsson, Peter Andersson
Life of this patent
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Abstract
There is provided a device for transferring a pattern from a stamp to a substrate, provided with a moldable film, by pressing the stamp and the substrate against each other. The device comprises at least one fixture for retaining a planar object such as the stamp or the substrate. The device is distinguished in that it comprises a heating element for heating the planar object, and measuring arrangement for determining a change in the size of the planar object due to the heating.
Claims24
A device for transferring a pattern from a stamp to a substrate provided with a moldable film by pressing the stamp and the substrate against each other, the device comprising:
- at least one fixture, wherein the at least one fixture retains a planar object, the planar object being at least one of the stamp and the substrate, wherein the fixture comprises;
- a heating element, wherein the heating element heats the planar object;
- a measuring arrangement, wherein the measuring arrangement determines a change in the size of the planar object due to the heating;
- and
- wherein the measuring arrangement comprises at least one support member arranged at a predetermined contact portion of the planar object for determining a displacement associated with the change of size of the planar object.
A device for transferring a pattern from a stamp to a substrate, provided with a moldable film, by pressing the stamp and the substrate against each other, the device comprising:
- at least one fixture for retaining a planar object, the planar object being at least one of the stamp and the substrate, the at least one fixture comprising a first and a second support member arranged to contact first and second predetermined portions of the planar object, at first and second contact portions (P1, P2), respectively;
- the contact portions (P1, P2) being essentially torque-free in at least a principal plane (X-Y) of the planar object;
- the support members being displaceable relative to each other along a first and a second displacement vector;
- and
- the first and second displacement vectors, when projected onto the principal plane, forming a line (L), on which projections of the contact portions (P1, P2) are situated.
A device for transferring a pattern from a stamp to a substrate, provided with a moldable film by pressing the stamp against the substrate, the device comprising:
- at least one fixture for retaining a planar object, the planar object being at least one of the substrate and the stamp, wherein the at least one fixture comprises a first and a second support member that are arranged to contact with the planar object at a first and a second contact portion (P1, P2), respectively;
- and
- wherein the contact portions (P1, P2) are essentially torque-free in at least a principal plane (X-Y) of the planar object;
- further wherein the support members are displaceable relative to each other along a line (L), which is comprised in the principal plane (X-Y), and on which the contact portions (P1, P2) are situated;
- and
- further wherein said displacement is associated with a change in a size of the planar object due to changes in a temperature of the planar object.
Dependencies are inferred from the claim text.