Fluid injector
AssigneeBenq Corporation
InventorsWei-Lin Chen, Hung-Sheng Hu
Life of this patent
Estimating the term…
Abstract
The fluid injector includes a base, a first through hole, a fluid actuator, a passivation layer, and a thick hydrophobic film. The base includes a chamber and a surface. The first through hole communicates with the chamber, and is disposed in the base. The fluid actuator is disposed on the surface near the first through hole, and is located outside the chamber. The passivation layer is disposed on the surface. The thick hydrophobic film formed of a crosslink defines a second through hole, and is disposed on the passivation layer outside the chamber. The second through hole communicates with the first through hole.
Claims10
A fluid injector comprising:
- a base including a chamber and a surface;
- a first through hole, communicating with the chamber, disposed in the base;
- an actuator disposed on the surface near the first through hole outside the chamber of the base;
- a passivation layer disposed on the surface;
- and
- an electro-formed layer with cross-link structure, defining a second through hole, disposed on the passivation layer outside the chamber, wherein the second through hole communicates with the first through hole.
A fluid injector comprising:
- a base including a chamber and a surface;
- a first through hole, communicating with the chamber, disposed in the base;
- an actuator disposed on the surface near the first through hole outside the chamber of the base;
- a passivation layer disposed on the surface;
- and
- a negative photosensitive electroformed layer, defining a second through hole, disposed on the passivation layer outside the chamber, wherein the second through hole communicates with the first through hole,
- wherein the negative photosensitive electroformed layer is formed by gray-scale lithography such that a gradient height profile remains in a partially exposed negative photosensitive electro-formed layer.
Dependencies are inferred from the claim text.