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US 7,252,097 B2Granted
System and method for integrating in-situ metrology within a wafer process
AssigneeLam Research Corporation
InventorsJohn M. Boyd, John M. de Larios, Michael Ravkin, Fred C. Redeker
Life of this patent
Estimating the term…
Abstract
A system and method for processing a wafer includes applying a process to the wafer. The process being supported by a surface tension gradient device. A result of the process is monitored. The monitored result is output.
Claims15
A wafer processing system comprising:
- at least one surface tension gradient device capable of supporting a process in a liquid meniscus, the surface tension gradient device including a proximity head including:
- a head surface, the head surface having a plurality of flat surface regions;
- a plurality of source inlets in at least one of the plurality of flat surface regions of the head surface;
- and
- a plurality of source outlets in at least one of the a plurality of flat surface regions of the head surface, wherein the plurality of source inlets and the plurality of source outlets are defined by discrete holes that reside at the head surface and extend through the flat surface regions of the head surface;
- an in-situ sensor for monitoring a result of the process;
- and
- a system controller being coupled to the in-situ sensor and the surface tension gradient device, the system controller including a process recipe.
5 more elements
A wafer processing system comprising:
- a proximity head capable of supporting a process in a liquid meniscus, the liquid meniscus being supported between a head surface of the proximity head and a surface of the wafer being processed, the proximity head including:
- an in-situ sensor for monitoring a result of the process, wherein the head surface has a plurality of flat surface regions;
- a plurality of source inlets in at least one of the at least one of the plurality of flat surface regions of the head surface;
- and
- a plurality of source outlets in at least one of the plurality of flat surface regions of the head surface, wherein the plurality of source inlets and the plurality of source outlets are defined by discrete holes that reside at the head surface and extend through the flat surface regions of the head surface;
- and
- a system controller being coupled to the in-situ sensor and the proximity head, the system controller including a process recipe.
4 more elements
A wafer processing system comprising:
- a proximity head capable of supporting a process in a liquid meniscus, the liquid meniscus being supported between a head surface of the proximity head and a surface of the wafer being processed, wherein the head surface of the proximity head has a first hydrophilic property for a selected liquid and the surface of the wafer being processed has a second hydrophilic property for the selected liquid, wherein the first hydrophilic property is more hydrophilic than the second hydrophilic property, the proximity head including:
- a first surface, the first surface having a plurality of flat surface regions;
- a plurality of source inlets in at least one of the plurality of flat surface regions of the head surface;
- and
- a plurality of source outlets in at least one of the plurality of flat surface regions of the head surface, wherein the plurality of source inlets and the plurality of source outlets are defined by discrete holes that reside at the head surface and extend through the flat surface regions of the head surface;
- an in-situ sensor for monitoring a result of the process;
- and
- a system controller being coupled to the in-situ sensor and the proximity head, the system controller including a process recipe, system controller including a capability for modifying the recipe for the process in the process controller according to the monitored results in real time.
5 more elements
Dependencies are inferred from the claim text.