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US 7,252,010 B2Granted
Pressure sensor system with semiconductor chip and antenna member
AssigneeHitachi, Ltd.
InventorsHiroyuki Ohta, Takashi Sumigawa
Life of this patent
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Abstract
In order to realize a compact wireless pressure sensor system which transmits an accurate pressure value, the present invention provides a pressure sensor system constructed at least by a silicon chip on which a circuit operated by electromagnetic wave energy is mounted, and a film which supports an antenna, in which film a through-hole is provided in the vicinity of a diaphragm part.
Claims9
A pressure sensor system, comprising:
- a semiconductor chip comprising a pressure sensor and a transmit control part to which a signal based on a measurement value of the pressure sensor is inputted;
- and
- an antenna member to which said semiconductor chip is fixed, the antenna member comprising an antenna electrically connected to the transmit control part, wherein
- said antenna member comprises a notched part in an area which overlaps said semiconductor chip.
1 more element
Dependencies are inferred from the claim text.