Micromechanical piezoresistive pressure sensor device
AssigneeRobert Bosch GmbH
InventorsJoerg Muchow, Hubert Benzel
Life of this patent
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Abstract
A micromechanical piezoresistive pressure sensor device having a sensor substrate, in which an essentially rectangular diaphragm region is provided; a piezoresistive resistance device having at least one piezoresistive resistor strip, which runs parallel to the longitudinal edges of the diaphragm device across the entire length of the diaphragm device and onto the surrounding sensor substrate; the piezoresistive resistor strip having a narrow center region and widened end regions and the widened end regions running across the short edges of the diaphragm device.
Claims13
A micromechanical piezoresistive pressure sensor device, comprising:
- a sensor substrate including a substantially rectangular diaphragm region;
- and
- a piezoresistive resistance device including at least one piezoresistive resistor strip that runs parallel to longitudinal edges of the diaphragm region across an entire length of the diaphragm region and onto a surrounding portion of the sensor substrate, wherein:
- the piezoresistive resistor strip includes a narrow center region and widened end regions, and the widened end regions run across short edges of the diaphragm region.
Dependencies are inferred from the claim text.