System and apparatus for sensing pressure in living organisms and inanimate objects
AssigneeAlfred E. Mann Foundation for Scientific Research
InventorJoseph H. Schulman
Life of this patent
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Abstract
System and apparatus for measuring pressure including a microelectronic device, an interface member attached to the microelectronic device, a pressure sensor having a diaphragm responsive to external pressure exerted upon the diaphragm, wherein the interface member is positioned between the microelectronic device and the pressure sensor and is attached to the pressure sensor providing a first cavity between the pressure sensor diaphragm and the interface member and wherein the pressure in the first cavity is set at an initial predetermined pressure.
Claims35
An apparatus for measuring pressure, comprising:
- a microelectronic device;
- a pressure sensor having a flexible portion responsive to external pressure exerted upon the flexible portion, wherein the pressure sensor is attached to the microelectronic device providing a contiguous chamber with the pressure sensor and the microelectronic device.
A system for measuring pressure comprising:
- a microelectronic device;
- a pressure sensor having a flexible portion responsive to external pressure exerted upon the flexible portion;
- wherein the pressure sensor is attached to the microelectronic device providing a contiguous chamber with the pressure sensor and the microelectronic device;
- and
- an external unit for communicating with the microelectronic device.
Dependencies are inferred from the claim text.