Scanning probe microscope and measuring method by means of the same
AssigneeSII NanoTechnology Inc.
InventorsMasafumi Watanabe, Kazunori Ando
Life of this patent
Estimating the term…
Abstract
A scanning probe microscope is capable of radiating light on a sample without moving the sample from the scanning probe microscope and is capable of measuring the sample while controlling the conditions under which the sample is placed without changing the location of the sample. The scanning probe microscope includes a cantilever having a probe at a distal end thereof, a sample moving device for moving the sample, and a detection unit for detecting deflection of the cantilever using a laser beam. The detection unit is detachably mounted to the scanning probe microscope during measurement of the sample and is detachable from the microscope to enable radiation of the sample with light without changing the location of the sample.
Claims15
A scanning probe microscope comprising:
- a cantilever having a probe on a distal end thereof;
- sample moving means for moving a sample;
- detachable cantilever deflection detecting means for detecting deflection of the cantilever by means of a laser beam;
- and exposure means for exposing the sample to light from an upper side of the cantilever.
A measuring method using a scanning probe microscope having a cantilever that has a probe on a distal end thereof, sample moving means for moving a sample, detachable cantilever deflection detecting means for detecting deflection of the cantilever by means of a laser beam, and exposure means for exposing the sample to light from an upper side of the cantilever, the method comprising the steps:
- measuring the sample by means of the scanning probe microscope;
- detaching the cantilever deflection detecting means to expose the sample by means of the exposure means;
- and then attaching the cantilever deflection detecting means for measuring the sample after exposure.
A scanning probe microscope comprising:
- a cantilever having a probe at a distal end thereof;
- sample moving means for moving a sample to be measured during use of the scanning probe microscope;
- exposure means disposed above the cantilever for exposing the sample to radiation;
- and a detection unit movable to a detection position to optically detect deflection of the cantilever during measurement of the sample before and/or after radiation of the sample by the exposure means and movable out of the detection position to enable radiation of the sample by the exposure means.
Dependencies are inferred from the claim text.