Removal of sulfur-containing impurities from volatile metal hydrides

A method for the purification of a volatile metal hydride comprising

• (a) obtaining a volatile metal hydride feed containing one or more acidic impurities, one of which is a sulfur-containing impurity;
• (b) contacting the feed with an alkaline material and reacting at least a portion of the sulfur-containing impurity with the alkaline material to remove the portion of the sulfur-containing impurity from the feed and provide an intermediate purified material;
• and
• (c) contacting the intermediate purified material with an adsorbent material to remove at least a portion of the sulfur-containing impurity from the intermediate purified material and provide a purified volatile metal hydride product;
• wherein the alkaline material is an aqueous solution of one or more alkaline compounds and wherein the alkaline material comprises one or more compounds selected from the group consisting of sodium hydroxide, potassium hydroxide, and tetraalkyl ammonium hydroxide.