Thin film magnetic head and method of manufacturing the same
AssigneeSAE Magnetics (H.K.) Ltd.
InventorNaoto Matono
Life of this patent
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Abstract
Provided are a thin film magnetic head and a method of manufacturing the same, which can locally miniaturized a pole width with high accuracy. A thin film coil is provided in a region located more rearward than a position (a first position) of a rear end of a top shield layer. A position of a surface of an underlayer of a rearward region of a write gap layer, i.e., the region in which the thin film coil is to be formed is lower than a position of a surface of an underlayer of a frontward region. Thus, a height (μm) of an apex portion formed of an insulating film decreases. Thus, a top pole can be formed so that a tip portion has a local miniature uniform width. Therefore, the pole width can be locally miniaturized with high accuracy.
Claims10
A method of manufacturing a thin film magnetic head including:
- two magnetic layers magnetically coupled to each other and having two magnetic poles which face each other with a gap layer in between and face a recording medium, a thin film coil provided between the two magnetic layers, and an insulating layer for insulating the thin film coil from the two magnetic layers, including the steps of:
- forming a magnetic transducer film;
- forming a first magnetic film between the magnetic transducer film and the two magnetic layers so as to extend to a first position in a direction away from a recording-medium-facing surface facing the recording medium;
- forming the thin film coil in a region farther from the recording-medium-facing surface than a second position by using as a reference position the second position farther from the recording-medium-facing surface than the first position;
- etching a bottom one of the two magnetic poles with an other of the two magnetic poles as a mask so that at least a portion of the bottom one of the two magnetic poles and the other of the two magnetic poles have a substantially same width;
- and
- forming a second magnetic film opposite to the first magnetic film with the magnetic transducer film in between so as to extend from the recording-medium-facing surface to a third position farther from the recording-medium-facing surface than the second position, wherein the second magnetic film has a planar shape and provides a surface that is substantially flat over the overall surface of the second magnetic film.
Dependencies are inferred from the claim text.