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US 7,248,434 B2Granted
Planarized perpendicular pole tip system and method for manufacturing the same
AssigneeHitachi Global Storage Technologies Netherlands B.V.
InventorsFrederick Hayes Dill, Jeffrey S. Lille, Son Van Nguyen, Hugo Alberto Emilio Santini
Life of this patent
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Abstract
A method for manufacturing a pole tip structure for a magnetic head is provided. An etch stop layer is initially deposited after which a transfer layer is deposited. Further deposited is at least one masking layer. Reactive ion etching is then performed to define a trench in at least the transfer layer. A pole tip layer is then deposited in the trench to define a pole tip structure flanked at least in part by the transfer layer. A surface of the transfer layer or etch stop layer then remains in co-planar relationship with a surface of the pole tip structure.
Claims31
A magnetic head, comprising:
- an etch stop layer;
- a transfer layer positioned above the etch stop layer with a trench formed therein, walls of the trench tapering together towards the etch stop layer;
- and
- a pole tip layer situated in the trench to define a pole tip structure flanked at least in part by the transfer layer;
- wherein at least one of an upper surface and a lower surface of at least one of the etch stop layer and the transfer layer remains in co-planar relationship with at least one of an upper surface and a lower surface of the pole tip structure,
- wherein a continuously planar portion of the etch stop layer is coextensive with and extends beyond the at least one of the upper surface and a lower surface of the pole tip structure in a direction parallel to a plane of deposition of the etch stop layer and parallel to an air bearing surface of the head.
3 more elements
A magnetic head, comprising:
- an etch stop layer;
- and
- a pole situated on top of the etch stop layer, walls of a portion of the pole tapering together towards the etch stop layer;
- wherein at least one of an upper surface and a lower surface of the etch stop layer remains in co-planar relationship with at least one of an upper surface and a lower surface of the portion of the pole,
- wherein a continuously planar portion of the etch stop layer is coextensive with and extends beyond the at least one of the upper surface and a lower surface of the portion of the pole in a direction parallel to a plane of deposition of the etch stop layer and parallel to an air bearing surface of the head.
2 more elements
A disk drive system, comprising:
- a magnetic recording disk;
- a magnetic head including:
- an etch stop layer, and
- a pole situated on top of the etch stop layer, walls of a portion of the pole tapering together towards the etch stop layer,
- wherein at least one of an upper surface and a lower surface of the etch stop layer remains in co-planar relationship with at least one of an upper surface and a lower surface of the portion of the pole,
- wherein a continuously planar portion of the etch stop layer is coextensive with and extends beyond the at least one of the upper surface and a lower surface of the portion of the pole in a direction parallel to a plane of deposition of the etch stop layer and parallel to an air bearing surface of the head;
- an actuator for moving the magnetic head across the magnetic recording disk so the magnetic head may access different regions of the magnetic recording disk;
- and
- a controller electrically coupled to the magnetic head.
6 more elements
A disk drive system, comprising:
- a magnetic recording disk;
- a magnetic head including:
- an etch stop layer,
- a transfer layer positioned above the etch stop layer with a trench formed therein, walls of the trench tapering together towards the etch stop layer, and
- a pole tip layer situated in the trench to define a pole tip structure flanked at least in part by the transfer layer,
- wherein at least one of an upper surface and a lower surface of at least one of the etch stop layer and the transfer layer remains in co-planar relationship with at least one of an upper surface and a lower surface of the pole tip structure,
- wherein a continuously planar portion of the etch stop layer is coextensive with and extends beyond the at least one of the upper surface and a lower surface of the portion of the pole in a direction parallel to a plane of deposition of the etch stop layer and parallel to an air bearing surface of the head;
- an actuator for moving the magnetic head across the magnetic recording disk so the magnetic head nay access different regions of the magnetic recording disk;
- and
- a controller electrically coupled to the magnetic head.
7 more elements
Dependencies are inferred from the claim text.