Scatterometer and a method for inspecting a surface
AssigneeKoninklijke Philips Electronics N.V.
InventorSipke Wadman
Life of this patent
Estimating the term…
Abstract
A scatterometer comprising a source (2) for providing an incident radiation beam (1) to be directed to the surface of a sample (4), and means for directing said incident radiation beam (1) at different angles towards the surface of the sample (4). The scatterometer furthermore comprising a screen (6) for receiving the reflection (7) of the incident radiation beam (1), and a camera (9) for recording the scatter profile (7) as projected on said screen (6) by the reflected radiation beam (5). The scatterometer is provided with means (11,12,13,14,15) for moving the screen (6) and thereby keeping it in the reflected radiation beam (5), and with means for keeping the camera (9) directed to the moving screen (6).
Claims7
A scatterometer comprising a source for providing an incident radiation beam to be directed to the surface of a sample, means for directing said incident radiation beam at different angles towards the surface of the sample, a screen for receiving the reflection of the incident radiation beam, and a camera for recording the scatter profile as projected on said screen by the reflected radiation beam, characterized by means for moving the screen and thereby keeping it in the reflected radiation beam, and by means for keeping the camera directed to the moving screen.
A method for inspecting a surface, whereby an radiation source provides an incident radiation beam being directed towards the surface of a sample at different angles, whereby a screen receives the reflected radiation beam, and whereby a camera records the scatter profile as projected on said screen, characterized in that the screen is moved to keep it in the reflected radiation beam, and in that the camera is kept directed to the moving screen.
Dependencies are inferred from the claim text.