Small-spot spectrometry instrument with reduced polarization and multiple-element depolarizer therefor
AssigneeTokyo Electron Limited
InventorsAdam E. Norton, Kenneth C. Johnson, Fred E. Stanke
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AssigneeTokyo Electron Limited
InventorsAdam E. Norton, Kenneth C. Johnson, Fred E. Stanke
Estimating the term…
A small-spot imaging, spectrometry instrument for measuring properties of a sample has a polarization-scrambling element, such as a birefringent plate depolarizer, incorporated between the polarization-introducing components of the system, such as the beamsplitter, and the microscope objective of the system. The plate depolarizer varies polarization with wavelength, and may be a Lyot depolarizer with two plates, or a depolarizer with more than two plates (such as a three-plate depolarizer). Sinusoidal perturbation in the resulting measured spectrum can be removed by data processing techniques or, if the depolarizer is thick or highly birefringent, the perturbation may be narrower than the wavelength resolution of the instrument.
A method of optically inspection a sample comprising the steps of:
A method of optically inspection a sample comprising the steps of:
Dependencies are inferred from the claim text.