Reference oscillator frequency stabilization
AssigneeNokia Corporation
InventorsTomi Mattila, Aarne Oja, Olli Jaakkola, Heikki Seppā
Life of this patent
Estimating the term…
Abstract
Method for stabilizing the frequency of a MEMS (Micro Electro Mechanical Systems) reference oscillator, and a MEMS reference oscillator, wherein the method comprises following steps: using two or more MEMS components, wherein each MEMS component is characterized by a set of properties, and selectively combining the desired properties from the MEMS components.
Claims7
MEMS (Micro Electro Mechanical Systems) reference oscillator with stabilized frequency, characterised in that the oscillator comprises:
- two or more MEMS components, wherein each MEMS component is characterized by a set of properties, and
- a combiner for selective combination of the desired properties from the MEMS components,
- characterised in that at least one of the components is a micromechanical bulk acoustic mode silicon resonator with a square plate and electrodes for capacitive coupling arranged on all sides of the plate, wherein the vibration mode is characterised as a 2-D plate expansion that preserves the original square shape.
MEMS (Micro Electro Mechanical Systems) reference oscillator with stabilized frequency, characterised in that the oscillator comprises:
- two or more MEMS components, wherein each MEMS component is characterized by a set of properties, and
- a combiner for selective combination of the desired properties from the MEMS components,
- characterised in that the oscillator utilizes a stable frequency reference obtained by measuring the phase difference of propagating bulk acoustical wave in a micromachined sound-wave guide at fixed positions.
MEMS (Micro Electro Mechanical Systems) reference oscillator with stabilized frequency, characterised in that the oscillator comprises:
- two or more MEMS components, wherein each MEMS component is characterized by a set of properties, and
- a combiner for selective combination of the desired properties from the MEMS components,
- characterised in that the oscillator utilizes a frequency meter based on stable capacitors and stable micromachined thin-film resistors that are used to create the Wien oscillator topology.
MEMS (Micro Electra Mechanical Systems) reference oscillator with stabilized frequency, characterised in that the oscillator comprises:
- two or more MEMS components, wherein each MEMS component is characterized by a set of properties, and
- a combiner for selective combination of the desired properties from the MEMS components,
- characterised in that a capacitor-resistor network, that is part of the Wien oscillator circuit, is used as a frequency meter in which the capacitors and resistors form a bridge circuit the balance of which depends on the frequency of the incoming frequency.
Dependencies are inferred from the claim text.