Diaphragm structure
AssigneeNGK Insulators, Ltd.
InventorsTsutomu Nanataki, Kunihiko Yoshioka
Life of this patent
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Abstract
There is disclosed a diaphragm structure that includes: a ceramic substrate 3 in which at least one opening 2 is formed, and a thin diaphragm portion 4 having a shape protruding on a side opposite to the opening 2 and constituted of a ceramic fired integrally with the ceramic substrate 3 in such a manner as to cover the opening 2. An opening shape of the opening 2 is a shape including at least one tip portion 5 in a longitudinal direction, having a curved shape, and a tapered portion 6 whose opening width gradually narrows toward the tip portion 5 and which is constituted of a curve or a straight line, and a portion of the diaphragm portion 4 corresponding to the tapered portion 6 has such a shape that a protruding height gradually lowers toward the tip portion 5.
Claims3
A diaphragm structure comprising:
- a ceramic substrate in which at least one opening is formed, and
- a thin diaphragm portion having a shape protruding on a side opposite to the opening and constituted of a ceramic integrally fired with the ceramic substrate in such a manner as to cover the opening;
- wherein an opening shape of the opening is a shape including at least one tip portion in a longitudinal direction having a curved shape, and a tapered portion whose opening width is gradually reduced toward the tip portion and which is constituted of a curve or a straight line, and
- a portion of the diaphragm portion corresponding to the tapered portion has such a shape that protruding height gradually lowers toward the tip portion.
Dependencies are inferred from the claim text.