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US 7,247,968 B2Granted
Two-axis micro-actuator with multidimensional actuation with large area stage
AssigneeSamsung Electronics Co., Ltd.
InventorsKyoung-lock Baeck, Jong-up Jun, Ju-hwan Jung, Seung-bum Hong
Life of this patent
Estimating the term…
Abstract
Provided is a two-axis actuator having a large stage area. The two-axis actuator includes a stage moving in two directions and connected to an upper part of an inertial part. The two-axis actuator is configured to maximize a stage area relative to the overall area of the actuator, thereby increasing the data storage capacity of the stage.
Claims16
A two-axis actuator comprising:
- a substrate;
- an inertial part with a substantially square shape and disposed at a predetermined elevation from the substrate;
- a stage with a substantially square shape connected to an upper part of the inertial part;
- a plurality of actuating frame parts disposed at peripheral regions corresponding to sides of the inertial part, each actuating frame part having a plurality of actuating frames disposed parallel to a corresponding side of the inertial part;
- a plurality of comb normal directional deformable spring parts, each comb normal directional deformable spring part having at least one spring member for perpendicularly connecting one side of the inertial part and the corresponding part of the actuating frame part;
- a plurality of fixed frame parts, each including a plurality of fixed frames alternately disposed in parallel to the actuating frames of a corresponding actuating frame part in each peripheral region;
- an actuating comb electrode disposed at each actuating frame extending in a direction perpendicular to the side of the inertial part in each corresponding peripheral region;
- a fixed comb electrode alternately disposed in parallel to the actuating comb electrode at each fixed frame of the fixed frame part;
- a plurality of comb directional deformable spring parts, each disposed on opposite sides of the actuating frame part to provide elastic recovery force in a direction perpendicular to the corresponding side of the inertial part in each peripheral region;
- a plurality of fixtures, disposed outward from sides of the stage by a predetermined distance, supporting the corresponding sides of the stage at a predetermined height from the substrate;
- and
- a plurality of two-axis deformable springs disposed between the stage and the fixtures to enable the stage to move in two axes.
9 more elements
A two-axis actuator comprising:
- a substrate;
- an inertial part disposed at a predetermined elevation from the substrate;
- a stage connected to an upper part of the inertial part;
- a plurality of actuating frame parts disposed at peripheral regions of the inertial part, each actuating frame part having a plurality of actuating frames;
- a plurality of comb normal directional deformable spring parts, each comb normal directional deformable spring part having at least one spring member for connecting the inertial part and corresponding part of the actuating frame part;
- a plurality of fixed frame parts, each including a plurality of fixed frames alternately disposed in parallel to the actuating frames of a corresponding actuating frame part in each peripheral region;
- an actuating comb electrode disposed at each actuating frame in each corresponding peripheral region;
- a fixed comb electrode alternately disposed in parallel to the actuating comb electrode at each fixed frame of the fixed frame part;
- a plurality of comb directional deformable spring parts, each disposed on opposite sides of the actuating frame part to provide elastic recovery force;
- a plurality of fixtures, disposed outward from sides of the stage by a predetermined distance. supporting the corresponding sides of the stage at a predetermined height from the substrate;
- and
- a plurality of two-axis deformable springs disposed between the stage and the fixtures to enable the stage to move in two axes.
9 more elements
Dependencies are inferred from the claim text.