Semiconductor device with stacked chips
AssigneeOki Electric Industry Co., Ltd.
InventorHidenori Hasegawa
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AssigneeOki Electric Industry Co., Ltd.
InventorHidenori Hasegawa
Estimating the term…
A method of manufacturing a semiconductor device which can solve a problem in which a wafer is warped by the influence of thermal contraction of a sealing resin due to a difference in thermal contraction between the wafer and the sealing resin. A second wafer on which electrodes are formed is stacked on a first wafer such that the electrodes of the second wafer are electrically connected to the electrodes formed on the first wafer, a portion between the first wafer and the second wafer is sealed with a resin, the second wafer and the sealing resin are half cut to expose the conductive posts from the sealing resin, conductive bumps for performing electric connection to an external circuit are formed on the exposed conductive posts, and the wafer is diced into independent semiconductor devices. In the resin sealing step, since both the first and second semiconductor elements are stacked in wafer states, a problem in which the wafers are warped by the influence of thermal contraction of the sealing resin due to a difference in thermal contraction between the wafers and the sealing resin can be solved.
A semiconductor device, comprising:
A semiconductor device, comprising:
Dependencies are inferred from the claim text.